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Title: The LLNL Cluster Tool

Abstract

{lg_bullet} The Cluster Tool -is a set of linked vacuum chambers -can deposit multiple layers of metal and metal oxides {lg_bullet} Each layer can be deposited without breaking vacuum {lg_bullet} Shadow masks can give each layer a different pattern {lg_bullet} The Cluster Tool will be operational in April

Authors:
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
908109
Report Number(s):
UCRL-CONF-229560
TRN: US200722%%435
DOE Contract Number:
W-7405-ENG-48
Resource Type:
Conference
Resource Relation:
Conference: Presented at: The LLNL Cluster Tool, Livermore, CA, United States, Apr 03 - Apr 04, 2007
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING; LAWRENCE LIVERMORE NATIONAL LABORATORY; OXIDES; DEPOSITION; LAYERS

Citation Formats

Hunter, S L. The LLNL Cluster Tool. United States: N. p., 2007. Web.
Hunter, S L. The LLNL Cluster Tool. United States.
Hunter, S L. Tue . "The LLNL Cluster Tool". United States. doi:. https://www.osti.gov/servlets/purl/908109.
@article{osti_908109,
title = {The LLNL Cluster Tool},
author = {Hunter, S L},
abstractNote = {{lg_bullet} The Cluster Tool -is a set of linked vacuum chambers -can deposit multiple layers of metal and metal oxides {lg_bullet} Each layer can be deposited without breaking vacuum {lg_bullet} Shadow masks can give each layer a different pattern {lg_bullet} The Cluster Tool will be operational in April},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 27 00:00:00 EDT 2007},
month = {Tue Mar 27 00:00:00 EDT 2007}
}

Conference:
Other availability
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