New nanofabrication technique using overlay for 15-nm zoneplate
Journal Article
·
· SPIE- International Society for OpticalEngineering
OSTI ID:907914
No abstract prepared.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE Director. Office of Science. Office of Basic EnergySciences; Natonal Science Foundation. Engineering Research CentreProgram, US Department of Defense. Defense Advanced Research ProjectsAgency
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 907914
- Report Number(s):
- LBNL-61036; R&D Project: 509201; BnR: KC0202030; TRN: US200721%%328
- Journal Information:
- SPIE- International Society for OpticalEngineering, Vol. 6110; Related Information: Journal Publication Date: 2006
- Publisher:
- SPIE, none
- Country of Publication:
- United States
- Language:
- English
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