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Title: Grating array systems having a plurality of gratings operative in a coherently additive mode and methods for making such grating array systems

Abstract

A plurality of gratings (G1, G2) are arranged together with a wavefront sensor, actuators, and feedback system to align the gratings in such a manner, that they operate like a single, large, monolithic grating. Sub-wavelength-scale movements in the mechanical mounting, due to environmental influences, are monitored by an interferometer (28), and compensated by precision actuators (16, 18, 20) that maintain the coherently additive mode. The actuators define the grating plane, and are positioned in response to the wavefronts from the gratings and a reference flat, thus producing the interferogram that contains the alignment information. Movement of the actuators is also in response to a diffraction-limited spot on the CCD (36) to which light diffracted from the gratings is focused. The actuator geometry is implemented to take advantage of the compensating nature of the degrees of freedom between gratings, reducing the number of necessary control variables.

Inventors:
 [1];  [2];  [3]
  1. Mendon, NY
  2. Victor, NY
  3. Pittsford, NY
Publication Date:
Research Org.:
University of Rochester
Sponsoring Org.:
USDOE
OSTI Identifier:
902763
Patent Number(s):
7,177,031
Application Number:
10/836,763
Assignee:
University of Rochester (Rochester, NY) OSTI
DOE Contract Number:
FC03-92SF19460
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Kessler, Terrance J, Bunkenburg, Joachim, and Huang, Hu. Grating array systems having a plurality of gratings operative in a coherently additive mode and methods for making such grating array systems. United States: N. p., 2007. Web.
Kessler, Terrance J, Bunkenburg, Joachim, & Huang, Hu. Grating array systems having a plurality of gratings operative in a coherently additive mode and methods for making such grating array systems. United States.
Kessler, Terrance J, Bunkenburg, Joachim, and Huang, Hu. Tue . "Grating array systems having a plurality of gratings operative in a coherently additive mode and methods for making such grating array systems". United States. doi:. https://www.osti.gov/servlets/purl/902763.
@article{osti_902763,
title = {Grating array systems having a plurality of gratings operative in a coherently additive mode and methods for making such grating array systems},
author = {Kessler, Terrance J and Bunkenburg, Joachim and Huang, Hu},
abstractNote = {A plurality of gratings (G1, G2) are arranged together with a wavefront sensor, actuators, and feedback system to align the gratings in such a manner, that they operate like a single, large, monolithic grating. Sub-wavelength-scale movements in the mechanical mounting, due to environmental influences, are monitored by an interferometer (28), and compensated by precision actuators (16, 18, 20) that maintain the coherently additive mode. The actuators define the grating plane, and are positioned in response to the wavefronts from the gratings and a reference flat, thus producing the interferogram that contains the alignment information. Movement of the actuators is also in response to a diffraction-limited spot on the CCD (36) to which light diffracted from the gratings is focused. The actuator geometry is implemented to take advantage of the compensating nature of the degrees of freedom between gratings, reducing the number of necessary control variables.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Feb 13 00:00:00 EST 2007},
month = {Tue Feb 13 00:00:00 EST 2007}
}

Patent:

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  • A method and a system are disclosed for determining at least one characteristic of a sample that contains a substrate and at least one film disposed on or over a surface of the substrate. The method includes a first step of placing a mask over a free surface of the at least one film, where the mask has a top surface and a bottom surface that is placed adjacent to the free surface of the film. The bottom surface of the mask has formed therein or thereon a plurality of features for forming at least one grating. A next stepmore » directs optical pump pulses through the mask to the free surface of the film, where individual ones of the pump pulses are followed by at least one optical probe pulse. The pump pulses are spatially distributed by the grating for launching a plurality of spatially distributed, time varying strain pulses within the film, which cause a detectable change in optical constants of the film. A next step detects a reflected or a transmitted portion of the probe pulses, which are also spatially distributed by the grating. A next step measures a change in at least one characteristic of at least one of reflected or transmitted probe pulses due to the change in optical constants, and a further step determines the at least one characteristic of the sample from the measured change in the at least one characteristic of the probe pulses. An optical mask is also disclosed herein, and forms a part of these teachings.« less
  • A method and a system are disclosed for determining at least one characteristic of a sample that contains a substrate and at least one film disposed on or over a surface of the substrate. The method includes a first step of placing a mask over a free surface of the at least one film, where the mask has a top surface and a bottom surface that is placed adjacent to the free surface of the film. The bottom surface of the mask has formed therein or thereon a plurality of features for forming at least one grating. A next stepmore » directs optical pump pulses through the mask to the free surface of the film, where individual ones of the pump pulses are followed by at least one optical probe pulse. The pump pulses are spatially distributed by the grating for launching a plurality of spatially distributed, time varying strain pulses within the film, which cause a detectable change in optical constants of the film. A next step detects a reflected or a transmitted portion of the probe pulses, which are also spatially distributed by the grating. A next step measures a change in at least one characteristic of at least one of reflected or transmitted probe pulses due to the change in optical constants, and a further step determines the at least one characteristic of the sample from the measured change in the at least one characteristic of the probe pulses. An optical mask is also disclosed herein, and forms a part of these teachings.« less
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