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Title: A low-power pressure-and temperature-programmed separation system for a micro gas chromatograph.

Abstract

This thesis presents the theory, design, fabrication and testing of the microvalves and columns necessary in a pressure- and temperature-programmed micro gas chromatograph ({micro}GC). Two microcolumn designs are investigated: a bonded Si-glass column having a rectangular cross section and a vapor-deposited silicon oxynitride (Sion) column having a roughly circular cross section. Both microcolumns contain integrated heaters and sensors for rapid, controlled heating. The 3.2 cm x 3.2 cm, 3 m-long silicon-glass column, coated with a non-polar polydimethylsiloxane (PDMS) stationary phase, separates 30 volatile organic compounds (VOCs) in less than 6 min. This is the most efficient micromachined column reported to date, producing greater than 4000 plates/m. The 2.7 mm x 1.4 mm Sion column eliminates the glass sealing plate and silicon substrate using deposited dielectrics and is the lowest power and fastest GC column reported to date; it requires only 11 mW to raise the column temperature by 100 C and has a response time of 11s and natural temperature ramp rate of 580 C/min. A 1 m-long PDMS-coated Sion microcolumn separates 10 VOCs in 52s. A system-based design approach was used for both columns.

Authors:
 [1];  [2];  [3];  [3];  [3]
  1. University of Michigan, Ann Arbor, MI
  2. Advanced Sensor Technologies, Albuquerque, NM
  3. University of Michigan, Ann Arbor, MI
Publication Date:
Research Org.:
Sandia National Laboratories
Sponsoring Org.:
USDOE
OSTI Identifier:
902593
Report Number(s):
SAND2006-7538
TRN: US200718%%85
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CROSS SECTIONS; DESIGN; DIELECTRIC MATERIALS; FABRICATION; GLASS; HEATERS; HEATING; ORGANIC COMPOUNDS; PLATES; SILICON; SUBSTRATES; TESTING; Volatile organic compounds-Analysis.; Chromatographic analysis.; Chromatography.; Gas chromatography.; Molecular integrated microsystems.

Citation Formats

Sacks, Richard D, Robinson, Alex Lockwood, Lambertus, Gordon R, Potkay, Joseph A, and Wise, Kensall D. A low-power pressure-and temperature-programmed separation system for a micro gas chromatograph.. United States: N. p., 2006. Web. doi:10.2172/902593.
Sacks, Richard D, Robinson, Alex Lockwood, Lambertus, Gordon R, Potkay, Joseph A, & Wise, Kensall D. A low-power pressure-and temperature-programmed separation system for a micro gas chromatograph.. United States. doi:10.2172/902593.
Sacks, Richard D, Robinson, Alex Lockwood, Lambertus, Gordon R, Potkay, Joseph A, and Wise, Kensall D. Sun . "A low-power pressure-and temperature-programmed separation system for a micro gas chromatograph.". United States. doi:10.2172/902593. https://www.osti.gov/servlets/purl/902593.
@article{osti_902593,
title = {A low-power pressure-and temperature-programmed separation system for a micro gas chromatograph.},
author = {Sacks, Richard D and Robinson, Alex Lockwood and Lambertus, Gordon R and Potkay, Joseph A and Wise, Kensall D},
abstractNote = {This thesis presents the theory, design, fabrication and testing of the microvalves and columns necessary in a pressure- and temperature-programmed micro gas chromatograph ({micro}GC). Two microcolumn designs are investigated: a bonded Si-glass column having a rectangular cross section and a vapor-deposited silicon oxynitride (Sion) column having a roughly circular cross section. Both microcolumns contain integrated heaters and sensors for rapid, controlled heating. The 3.2 cm x 3.2 cm, 3 m-long silicon-glass column, coated with a non-polar polydimethylsiloxane (PDMS) stationary phase, separates 30 volatile organic compounds (VOCs) in less than 6 min. This is the most efficient micromachined column reported to date, producing greater than 4000 plates/m. The 2.7 mm x 1.4 mm Sion column eliminates the glass sealing plate and silicon substrate using deposited dielectrics and is the lowest power and fastest GC column reported to date; it requires only 11 mW to raise the column temperature by 100 C and has a response time of 11s and natural temperature ramp rate of 580 C/min. A 1 m-long PDMS-coated Sion microcolumn separates 10 VOCs in 52s. A system-based design approach was used for both columns.},
doi = {10.2172/902593},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2006},
month = {10}
}

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