The nucleation of atomic layer deposited HfO{sub 2} films, and evolution of their microstructure, studied by grazing incidence small angle x-day scattering using synchrotron radiation.
Journal Article
·
· Appl. Phys. Lett. ; 88(3): 032907
OSTI ID:898744
No abstract prepared.
- Research Organization:
- Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS); NIST; IMEC; VTT Technology Research Center of Finland
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- DE-AC02-06CH11357
- OSTI ID:
- 898744
- Journal Information:
- Appl. Phys. Lett. ; 88(3): 032907, Related Information: Jan. 16, 2006
- Country of Publication:
- United States
- Language:
- English
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