skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Model-based Processing of Microcantilever Sensor Arrays

Journal Article · · The Institute of Electrical and Electronics Engineers Journal of Microelectromechanical Systems, vol. 15, no. 5, October 1, 2006, pp. 1379-1391
OSTI ID:898006

We have developed a model-based processor (MBP) for a microcantilever-array sensor to detect target species in solution. We perform a proof-of-concept experiment, fit model parameters to the measured data and use them to develop a Gauss-Markov simulation. We then investigate two cases of interest, averaged deflection data and multi-channel data. For this evaluation we extract model parameters via a model-based estimation, perform a Gauss-Markov simulation, design the optimal MBP and apply it to measured experimental data. The performance of the MBP in the multi-channel case is evaluated by comparison to a ''smoother'' (averager) typically used for microcantilever signal analysis. It is shown that the MBP not only provides a significant gain ({approx} 80dB) in signal-to-noise ratio (SNR), but also consistently outperforms the smoother by 40-60 dB. Finally, we apply the processor to the smoothed experimental data and demonstrate its capability for chemical detection. The MBP performs quite well, apart from a correctable systematic bias error.

Research Organization:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
W-7405-ENG-48
OSTI ID:
898006
Report Number(s):
UCRL-JRNL-212326; TRN: US200706%%189
Journal Information:
The Institute of Electrical and Electronics Engineers Journal of Microelectromechanical Systems, vol. 15, no. 5, October 1, 2006, pp. 1379-1391, Journal Name: The Institute of Electrical and Electronics Engineers Journal of Microelectromechanical Systems, vol. 15, no. 5, October 1, 2006, pp. 1379-1391
Country of Publication:
United States
Language:
English