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Title: EUV testing of multilayer mirrors: critical issues

Abstract

Recently, while performing extensive EUV irradiation endurance testing on Ru-capped multilayer mirrors in the presence of elevated partial pressures of water and hydrocarbons, NIST has observed that the amount of EUV-induced damage actually decreases with increasing levels of water vapor above {approx} 5 x 10{sup -7} Torr. It is thought that the admitted water vapor may interact with otherwise stable, condensed carbonaceous species in an UHV vacuum system to increase the background levels of simple gaseous carbon-containing molecules. Some support for this hypothesis was demonstrated by observing the mitigating effect of very small levels of simple hydrocarbons with the intentional introduction of methyl alcohol in addition to the water vapor. It was found that the damage rate decreased by at least an order of magnitude when the partial pressure of methyl alcohol was just one percent of the water partial pressure. These observations indicate that the hydrocarbon components of the vacuum environment under actual testing conditions must be characterized and controlled to 10{sup -11} Torr or better in order to quantify the damage caused by high levels of water vapor. The possible effects of exposure beam size and out-of-band radiation on mirror lifetime testing will also be discussed.

Authors:
; ; ; ; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
894751
Report Number(s):
UCRL-PROC-219279
Journal ID: ISSN 0277-786X; TRN: US200702%%337
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Conference
Resource Relation:
Journal Volume: 6151; Conference: Presented at: SPIE Microlithography, San Jose, CA, United States, Feb 19 - Feb 24, 2006
Country of Publication:
United States
Language:
English
Subject:
10 SYNTHETIC FUELS; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; HYDROCARBONS; HYPOTHESIS; IRRADIATION; LIFETIME; METHANOL; MIRRORS; PARTIAL PRESSURE; RADIATIONS; TESTING; VACUUM SYSTEMS; WATER; WATER VAPOR

Citation Formats

Hill, S B, Ermanoski, I, Grantham, S, Tarrio, C, Lucatorto, T B, Madey, T E, Bajt, S, Chandhok, M, Yan, P, Wood, O, Wurn, S, and Edwards, N V. EUV testing of multilayer mirrors: critical issues. United States: N. p., 2006. Web. doi:10.1117/12.656502.
Hill, S B, Ermanoski, I, Grantham, S, Tarrio, C, Lucatorto, T B, Madey, T E, Bajt, S, Chandhok, M, Yan, P, Wood, O, Wurn, S, & Edwards, N V. EUV testing of multilayer mirrors: critical issues. United States. doi:10.1117/12.656502.
Hill, S B, Ermanoski, I, Grantham, S, Tarrio, C, Lucatorto, T B, Madey, T E, Bajt, S, Chandhok, M, Yan, P, Wood, O, Wurn, S, and Edwards, N V. Fri . "EUV testing of multilayer mirrors: critical issues". United States. doi:10.1117/12.656502. https://www.osti.gov/servlets/purl/894751.
@article{osti_894751,
title = {EUV testing of multilayer mirrors: critical issues},
author = {Hill, S B and Ermanoski, I and Grantham, S and Tarrio, C and Lucatorto, T B and Madey, T E and Bajt, S and Chandhok, M and Yan, P and Wood, O and Wurn, S and Edwards, N V},
abstractNote = {Recently, while performing extensive EUV irradiation endurance testing on Ru-capped multilayer mirrors in the presence of elevated partial pressures of water and hydrocarbons, NIST has observed that the amount of EUV-induced damage actually decreases with increasing levels of water vapor above {approx} 5 x 10{sup -7} Torr. It is thought that the admitted water vapor may interact with otherwise stable, condensed carbonaceous species in an UHV vacuum system to increase the background levels of simple gaseous carbon-containing molecules. Some support for this hypothesis was demonstrated by observing the mitigating effect of very small levels of simple hydrocarbons with the intentional introduction of methyl alcohol in addition to the water vapor. It was found that the damage rate decreased by at least an order of magnitude when the partial pressure of methyl alcohol was just one percent of the water partial pressure. These observations indicate that the hydrocarbon components of the vacuum environment under actual testing conditions must be characterized and controlled to 10{sup -11} Torr or better in order to quantify the damage caused by high levels of water vapor. The possible effects of exposure beam size and out-of-band radiation on mirror lifetime testing will also be discussed.},
doi = {10.1117/12.656502},
journal = {},
number = ,
volume = 6151,
place = {United States},
year = {Fri Feb 24 00:00:00 EST 2006},
month = {Fri Feb 24 00:00:00 EST 2006}
}

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