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Title: MEMS characterization LDRD:Final report (FY03-FY05).

Abstract

No abstract prepared.

Authors:
; ; ; ; ; ; ; ;
Publication Date:
Research Org.:
Sandia National Laboratories
Sponsoring Org.:
USDOE
OSTI Identifier:
883489
Report Number(s):
SAND2005-7083
TRN: US200614%%653
DOE Contract Number:
AC04-94AL85000
Resource Type:
Technical Report
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING; MICROELECTRONIC CIRCUITS; MINIATURIZATION; TECHNOLOGY ASSESSMENT; Aging tests (Materials); Molecular integrated microsystems.; Mass spectrometry.; Microelectromechanical systems.

Citation Formats

Ordonez, Therese A., Zavadil, Kevin Robert, Brown, Jason R., Kent, Michael Stuart, Simpson, Regina Lynn, Tallant, David Robert, Ohlhausen, James Anthony, Garcia, Manuel Joseph, and Thornberg, Steven Michael. MEMS characterization LDRD:Final report (FY03-FY05).. United States: N. p., 2005. Web. doi:10.2172/883489.
Ordonez, Therese A., Zavadil, Kevin Robert, Brown, Jason R., Kent, Michael Stuart, Simpson, Regina Lynn, Tallant, David Robert, Ohlhausen, James Anthony, Garcia, Manuel Joseph, & Thornberg, Steven Michael. MEMS characterization LDRD:Final report (FY03-FY05).. United States. doi:10.2172/883489.
Ordonez, Therese A., Zavadil, Kevin Robert, Brown, Jason R., Kent, Michael Stuart, Simpson, Regina Lynn, Tallant, David Robert, Ohlhausen, James Anthony, Garcia, Manuel Joseph, and Thornberg, Steven Michael. Thu . "MEMS characterization LDRD:Final report (FY03-FY05).". United States. doi:10.2172/883489. https://www.osti.gov/servlets/purl/883489.
@article{osti_883489,
title = {MEMS characterization LDRD:Final report (FY03-FY05).},
author = {Ordonez, Therese A. and Zavadil, Kevin Robert and Brown, Jason R. and Kent, Michael Stuart and Simpson, Regina Lynn and Tallant, David Robert and Ohlhausen, James Anthony and Garcia, Manuel Joseph and Thornberg, Steven Michael},
abstractNote = {No abstract prepared.},
doi = {10.2172/883489},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Dec 01 00:00:00 EST 2005},
month = {Thu Dec 01 00:00:00 EST 2005}
}

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