Metod And Apparatus For Debris Mitigation For An Electrical Discharge Source

Patent · Tue May 03 00:00:00 EDT 2005

OSTI ID:879899

Klebanoff, Leonard E ^[1]; Silfvast, William T ^[2]; Rader, Daniel J ^[3]

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1. San Clemente, CA
2. St. Helena, CA
3. Albuquerque, NM

Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: EUV LLC (Santa Clara, CA)
• Patent Number(s): US 6888297
• Application Number: 10/325997
• OSTI ID: 879899
• Country of Publication: United States
• Language: English