High temperature stability multilayers for EUV condenser optics
Journal Article
·
· Applied Optics
OSTI ID:878205
We investigate the thermal stability of Mo/SiC multilayer coatings at elevated temperatures. Transmission electron microscopy and x-ray diffraction studies show that upon annealing a thermally-induced structural relaxation occurs that transforms the polycrystalline Mo and amorphous SiC layers in as-deposited multilayers into amorphous Mo-Si-C alloy and crystalline SiC, respectively. After this relaxation process is complete the multilayer is stable at temperatures up to 400 C.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 878205
- Report Number(s):
- UCRL-JRNL-212020; APOPAI; TRN: US200611%%105
- Journal Information:
- Applied Optics, Vol. 44, Issue 36; ISSN 0003-6935
- Country of Publication:
- United States
- Language:
- English
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