Maskless Micro-Ion-Beam Reduction Lithography (MMRL)
Conference
·
OSTI ID:8773
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 8773
- Report Number(s):
- LBNL-43166-Abs.
- Resource Relation:
- Conference: The 43rd International Conference on Electron, Ion and Beam Technology and Nanofabrication (EIPBN '99), Marco Island, FL, June 1-4, 1999
- Country of Publication:
- United States
- Language:
- English
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