Stress relaxation of tetrahedral amorphous-carbon (ta-C) thin films by pulsed excimer laser annealing.
Journal Article
·
· Proposed for publication in Journal of Applied Physics.
OSTI ID:876272
No abstract prepared.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 876272
- Report Number(s):
- SAND2004-3167J; TRN: US200606%%18
- Journal Information:
- Proposed for publication in Journal of Applied Physics., Journal Name: Proposed for publication in Journal of Applied Physics.
- Country of Publication:
- United States
- Language:
- English
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