Method for localizing and isolating an errant process step

Patent · Wed Jan 01 00:00:00 EST 2003

OSTI ID:875118

Karnowski, Thomas P ^[1]; Ferrell, Regina K ^[1]

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1. Knoxville, TN

A method for localizing and isolating an errant process includes the steps of retrieving from a defect image database a selection of images each image having image content similar to image content extracted from a query image depicting a defect, each image in the selection having corresponding defect characterization data. A conditional probability distribution of the defect having occurred in a particular process step is derived from the defect characterization data. A process step as a highest probable source of the defect according to the derived conditional probability distribution is then identified. A method for process step defect identification includes the steps of characterizing anomalies in a product, the anomalies detected by an imaging system. A query image of a product defect is then acquired. A particular characterized anomaly is then correlated with the query image. An errant process step is then associated with the correlated image.

• Research Organization: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
• DOE Contract Number: AC05-96OR22464
• Assignee: Ut-Battelle, LLC (Oak Ridge, TN)
• Patent Number(s): US 6535776
• OSTI ID: 875118
• Country of Publication: United States
• Language: English

Related Subjects

method
localizing
isolating
errant
process
step
steps
retrieving
defect
image
database
selection
images
content
similar
extracted
query
depicting
characterization
data
conditional
probability
distribution
occurred
derived
probable
source
identified
identification
characterizing
anomalies
product
detected
imaging
acquired
characterized
anomaly
correlated
associated
image data
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