Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement

Patent · Wed Jan 01 00:00:00 EST 2003

OSTI ID:874992

Rodgers, M Steven ^[1]; Miller, Samuel L ^[1]

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1. Albuquerque, NM

A compact electrostatic actuator is disclosed for microelectromechanical (MEM) applications. The actuator utilizes stationary and moveable electrodes, with the stationary electrodes being formed on a substrate and the moveable electrodes being supported above the substrate on a frame. The frame provides a rigid structure which allows the electrostatic actuator to be operated at high voltages (up to 190 Volts) to provide a relatively large actuation force compared to conventional electrostatic comb actuators which are much larger in size. For operation at its maximum displacement, the electrostatic actuator is relatively insensitive to the exact value of the applied voltage and provides a self-limiting displacement.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6507138
• OSTI ID: 874992
• Country of Publication: United States
• Language: English

Related Subjects

compact
high-stability
electrostatic
actuator
featuring
contact-free
self-limiting
displacement
disclosed
microelectromechanical
applications
utilizes
stationary
moveable
electrodes
formed
substrate
supported
frame
provides
rigid
structure
allows
operated
voltages
190
volts
provide
actuation
force
compared
conventional
comb
actuators
larger
size
operation
maximum
insensitive
exact
value
applied
voltage
applied voltage
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