Multi-level scanning method for defect inspection
Abstract
A method for performing scanned defect inspection of a collection of contiguous areas using a specified false-alarm-rate and capture-rate within an inspection system that has characteristic seek times between inspection locations. The multi-stage method involves setting an increased false-alarm-rate for a first stage of scanning, wherein subsequent stages of scanning inspect only the detected areas of probable defects at lowered values for the false-alarm-rate. For scanning inspection operations wherein the seek time and area uncertainty is favorable, the method can substantially increase inspection throughput.
- Inventors:
-
- Oakland, CA
- Richmond, CA
- Publication Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
- OSTI Identifier:
- 874891
- Patent Number(s):
- US 6484306
- Assignee:
- The Regents of the University of California (Oakland, CA)
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- multi-level; scanning; method; defect; inspection; performing; scanned; collection; contiguous; specified; false-alarm-rate; capture-rate; characteristic; seek; times; locations; multi-stage; involves; setting; increased; stage; subsequent; stages; inspect; detected; probable; defects; lowered; values; operations; time; uncertainty; favorable; substantially; increase; throughput; /716/378/382/430/700/
Citation Formats
Bokor, Jeffrey, and Jeong, Seongtae. Multi-level scanning method for defect inspection. United States: N. p., 2002.
Web.
Bokor, Jeffrey, & Jeong, Seongtae. Multi-level scanning method for defect inspection. United States.
Bokor, Jeffrey, and Jeong, Seongtae. Tue .
"Multi-level scanning method for defect inspection". United States. https://www.osti.gov/servlets/purl/874891.
@article{osti_874891,
title = {Multi-level scanning method for defect inspection},
author = {Bokor, Jeffrey and Jeong, Seongtae},
abstractNote = {A method for performing scanned defect inspection of a collection of contiguous areas using a specified false-alarm-rate and capture-rate within an inspection system that has characteristic seek times between inspection locations. The multi-stage method involves setting an increased false-alarm-rate for a first stage of scanning, wherein subsequent stages of scanning inspect only the detected areas of probable defects at lowered values for the false-alarm-rate. For scanning inspection operations wherein the seek time and area uncertainty is favorable, the method can substantially increase inspection throughput.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}
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