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Title: Miniature quadrupole mass spectrometer having a cold cathode ionization source

Patent ·
OSTI ID:874739

An improved quadrupole mass spectrometer is described. The improvement lies in the substitution of the conventional hot filament electron source with a cold cathode field emitter array which in turn allows operating a small QMS at much high internal pressures then are currently achievable. By eliminating of the hot filament such problems as thermally "cracking" delicate analyte molecules, outgassing a "hot" filament, high power requirements, filament contamination by outgas species, and spurious em fields are avoid all together. In addition, the ability of produce FEAs using well-known and well developed photolithographic techniques, permits building a QMS having multiple redundancies of the ionization source at very low additional cost.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia National Laboratories (Livermore, CA)
Patent Number(s):
US 6452167
OSTI ID:
874739
Country of Publication:
United States
Language:
English

References (2)

High‐pressure effects in miniature arrays of quadrupole analyzers for residual gas analysis from 10 −9 to 10 −2 Torr journal May 1996
The Mass Filter: Design and Performance book January 1976