Gas-driven microturbine

Patent · 01 January 2002

OSTI ID:874309

Sniegowski, Jeffrey J ^[1]; Rodgers, Murray S ^[1]; McWhorter, Paul J ^[1]; Aeschliman, Daniel P ^[2]; Miller, William M ^[3]

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1. Albuquerque, NM
2. Cedar Crest, NM
3. Tijeras, NM

A microturbine fabricated by a three-level semiconductor batch-fabrication process based on polysilicon surface-micromachining. The microturbine comprises microelectromechanical elements formed from three polysilicon multi-layer surfaces applied to a silicon substrate. Interleaving sacrificial oxide layers provides electrical and physical isolation, and selective etching of both the sacrificial layers and the polysilicon layers allows formation of individual mechanical and electrical elements as well as the required space for necessary movement of rotating turbine parts and linear elements.

• Research Organization: SANDIA CORP
• DOE Contract Number: AC04-94AL85000
• Assignee: The United States of America as represented by the United States Department (Washington, DC)
• Patent Number(s): US 6363712
• OSTI ID: 874309
• Country of Publication: United States
• Language: English

Related Subjects

/60/216/310/
allows
applied
based
batch-fabrication
electrical
elements
elements formed
etching
fabricated
fabrication process
formation
formed
gas-driven
individual
interleaving
isolation
layers
linear
mechanical
microelectromechanical
microturbine
movement
multi-layer
oxide
oxide layer
physical
polysilicon
process
provides
required
rotating
sacrificial
selective
semiconductor
silicon
silicon substrate
silicon surface
space
substrate
surface-micromachining
surfaces
three-level
turbine