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Title: Extreme-UV electrical discharge source

Abstract

An extreme ultraviolet and soft x-ray radiation electric capillary discharge source that includes a boron nitride housing defining a capillary bore that is positioned between two electrodes one of which is connected to a source of electric potential can generate a high EUV and soft x-ray radiation flux from the capillary bore outlet with minimal debris. The electrode that is positioned adjacent the capillary bore outlet is typically grounded. Pyrolytic boron nitride, highly oriented pyrolytic boron nitride, and cubic boron nitride are particularly suited. The boron nitride capillary bore can be configured as an insert that is encased in an exterior housing that is constructed of a thermally conductive material. Positioning the ground electrode sufficiently close to the capillary bore outlet also reduces bore erosion.

Inventors:
 [1];  [2];  [3]
  1. (Tracey, CA)
  2. (Los Ranchos de Albuquerque, NM)
  3. (Albuquerque, NM)
Publication Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
874281
Patent Number(s):
US 6356618
Assignee:
EUV LLC (Santa Clara, CA) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
extreme-uv; electrical; discharge; source; extreme; ultraviolet; soft; x-ray; radiation; electric; capillary; boron; nitride; housing; defining; bore; positioned; electrodes; connected; potential; generate; euv; flux; outlet; minimal; debris; electrode; adjacent; typically; grounded; pyrolytic; highly; oriented; cubic; suited; configured; insert; encased; exterior; constructed; thermally; conductive; material; positioning; ground; sufficiently; close; reduces; erosion; boron nitride; conductive material; extreme ultraviolet; x-ray radiation; housing defining; /378/372/

Citation Formats

Fornaciari, Neal R., Nygren, Richard E., and Ulrickson, Michael A. Extreme-UV electrical discharge source. United States: N. p., 2002. Web.
Fornaciari, Neal R., Nygren, Richard E., & Ulrickson, Michael A. Extreme-UV electrical discharge source. United States.
Fornaciari, Neal R., Nygren, Richard E., and Ulrickson, Michael A. Tue . "Extreme-UV electrical discharge source". United States. https://www.osti.gov/servlets/purl/874281.
@article{osti_874281,
title = {Extreme-UV electrical discharge source},
author = {Fornaciari, Neal R. and Nygren, Richard E. and Ulrickson, Michael A.},
abstractNote = {An extreme ultraviolet and soft x-ray radiation electric capillary discharge source that includes a boron nitride housing defining a capillary bore that is positioned between two electrodes one of which is connected to a source of electric potential can generate a high EUV and soft x-ray radiation flux from the capillary bore outlet with minimal debris. The electrode that is positioned adjacent the capillary bore outlet is typically grounded. Pyrolytic boron nitride, highly oriented pyrolytic boron nitride, and cubic boron nitride are particularly suited. The boron nitride capillary bore can be configured as an insert that is encased in an exterior housing that is constructed of a thermally conductive material. Positioning the ground electrode sufficiently close to the capillary bore outlet also reduces bore erosion.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2002},
month = {1}
}

Patent:

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