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Title: Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing

Patent ·
OSTI ID:874226
 [1]
  1. Marietta, GA
+ Show Author Affiliations

Systems and methods are described for fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. A method of forming a lithium cobalt oxide film includes depositing a film of lithium cobalt oxide on a substrate; rapidly heating the film of lithium cobalt oxide to a target temperature; and maintaining the film of lithium cobalt oxide at the target temperature for a target annealing time of at most, approximately 60 minutes. The systems and methods provide advantages because they require less time to implement and are, therefore less costly than previous techniques.

Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
DOE Contract Number:
AC05-96OR22464
Assignee:
Lockheed Martin Energy Research Corporation (Oak Ridge, TN)
Patent Number(s):
US 6344366
OSTI ID:
874226
Country of Publication:
United States
Language:
English

References (5)

Preferred Orientation of Polycrystalline LiCoO[sub 2] Films journal January 2000
Thin-film cathodes for secondary lithium batteries journal April 1995
Characterization of sprayed and sputter deposited LiCoO2 thin films for rechargeable microbatteries journal December 1996
Characterization of Thin-Film Rechargeable Lithium Batteries with Lithium Cobalt Oxide Cathodes journal January 1996
Substrate Effect on the Microstructure and Electrochemical Properties in the Deposition of a Thin Film LiCoO[sub 2] Electrode journal January 1999

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Related Subjects

fabrication
highly
textured
lithium
cobalt
oxide
films
rapid
thermal
annealing
systems
methods
described
method
forming
film
depositing
substrate
rapidly
heating
target
temperature
maintaining
time
approximately
60
minutes
provide
advantages
require
implement
costly
previous
techniques
methods provide
cobalt oxide
thermal annealing
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