Lamp system for uniform semiconductor wafer heating
Abstract
A lamp system with a very soft high-intensity output is provided over a large area by water cooling a long-arc lamp inside a diffuse reflector of polytetrafluorethylene (PTFE) and titanium dioxide (TiO.sub.2) white pigment. The water is kept clean and pure by a one micron particulate filter and an activated charcoal/ultraviolet irradiation system that circulates and de-ionizes and biologically sterilizes the coolant water at all times, even when the long-arc lamp is off.
- Inventors:
-
- Livermore, CA
- Publication Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 873810
- Patent Number(s):
- US 6252203
- Assignee:
- Regents of University of California (Oakland, CA)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- lamp; uniform; semiconductor; wafer; heating; soft; high-intensity; output; provided; water; cooling; long-arc; inside; diffuse; reflector; polytetrafluorethylene; ptfe; titanium; dioxide; white; pigment; kept; clean; pure; micron; particulate; filter; activated; charcoal; ultraviolet; irradiation; circulates; de-ionizes; biologically; sterilizes; coolant; times; coolant water; activated charcoal; semiconductor wafer; titanium dioxide; particulate filter; water cooling; ultraviolet irradiation; long-arc lamp; diffuse reflector; soft high-intensity; uniform semiconductor; high-intensity output; lamp inside; /219/118/362/392/
Citation Formats
Zapata, Luis E, and Hackel, Lloyd. Lamp system for uniform semiconductor wafer heating. United States: N. p., 2001.
Web.
Zapata, Luis E, & Hackel, Lloyd. Lamp system for uniform semiconductor wafer heating. United States.
Zapata, Luis E, and Hackel, Lloyd. 2001.
"Lamp system for uniform semiconductor wafer heating". United States. https://www.osti.gov/servlets/purl/873810.
@article{osti_873810,
title = {Lamp system for uniform semiconductor wafer heating},
author = {Zapata, Luis E and Hackel, Lloyd},
abstractNote = {A lamp system with a very soft high-intensity output is provided over a large area by water cooling a long-arc lamp inside a diffuse reflector of polytetrafluorethylene (PTFE) and titanium dioxide (TiO.sub.2) white pigment. The water is kept clean and pure by a one micron particulate filter and an activated charcoal/ultraviolet irradiation system that circulates and de-ionizes and biologically sterilizes the coolant water at all times, even when the long-arc lamp is off.},
doi = {},
url = {https://www.osti.gov/biblio/873810},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2001},
month = {Mon Jan 01 00:00:00 EST 2001}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.