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Title: Method of forming a dielectric thin film having low loss composition of Ba.sub.x Sr.sub.y Ca.sub.1-x-y TiO.sub.3 : Ba.sub.0.12-0.25 Sr.sub.0.35-0.47 Ca.sub.0.32-0.53 TiO.sub.3

Abstract

A dielectric thin-film material for microwave applications, including use as a capacitor, the thin-film comprising a composition of barium strontium calcium and titanium of perovskite type (Ba.sub.x Sr.sub.y Ca.sub.1-x-y)TiO.sub.3. Also provided is a method for making a dielectric thin film of that formula over a wide compositional range through a single deposition process.

Inventors:
 [1];  [2];  [3]
  1. Alameda, CA
  2. Berkeley, CA
  3. Albany, CA
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
OSTI Identifier:
873376
Patent Number(s):
US 6146907
Assignee:
United States of America as represented by United States (Washington, DC)
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; forming; dielectric; film; loss; composition; sr; 1-x-y; 12-0; 25; 35-0; 47; 32-0; 53; thin-film; material; microwave; applications; including; capacitor; comprising; barium; strontium; calcium; titanium; perovskite; type; provided; formula; wide; compositional; range; single; deposition; process; deposition process; film comprising; film material; microwave applications; strontium calcium; thin-film material; thin-film comprising; loss composition; barium strontium; dielectric thin-film; /438/501/

Citation Formats

Xiang, Xiao-Dong, Chang, Hauyee, and Takeuchi, Ichiro. Method of forming a dielectric thin film having low loss composition of Ba.sub.x Sr.sub.y Ca.sub.1-x-y TiO.sub.3 : Ba.sub.0.12-0.25 Sr.sub.0.35-0.47 Ca.sub.0.32-0.53 TiO.sub.3. United States: N. p., 2000. Web.
Xiang, Xiao-Dong, Chang, Hauyee, & Takeuchi, Ichiro. Method of forming a dielectric thin film having low loss composition of Ba.sub.x Sr.sub.y Ca.sub.1-x-y TiO.sub.3 : Ba.sub.0.12-0.25 Sr.sub.0.35-0.47 Ca.sub.0.32-0.53 TiO.sub.3. United States.
Xiang, Xiao-Dong, Chang, Hauyee, and Takeuchi, Ichiro. Sat . "Method of forming a dielectric thin film having low loss composition of Ba.sub.x Sr.sub.y Ca.sub.1-x-y TiO.sub.3 : Ba.sub.0.12-0.25 Sr.sub.0.35-0.47 Ca.sub.0.32-0.53 TiO.sub.3". United States. https://www.osti.gov/servlets/purl/873376.
@article{osti_873376,
title = {Method of forming a dielectric thin film having low loss composition of Ba.sub.x Sr.sub.y Ca.sub.1-x-y TiO.sub.3 : Ba.sub.0.12-0.25 Sr.sub.0.35-0.47 Ca.sub.0.32-0.53 TiO.sub.3},
author = {Xiang, Xiao-Dong and Chang, Hauyee and Takeuchi, Ichiro},
abstractNote = {A dielectric thin-film material for microwave applications, including use as a capacitor, the thin-film comprising a composition of barium strontium calcium and titanium of perovskite type (Ba.sub.x Sr.sub.y Ca.sub.1-x-y)TiO.sub.3. Also provided is a method for making a dielectric thin film of that formula over a wide compositional range through a single deposition process.},
doi = {},
url = {https://www.osti.gov/biblio/873376}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {1}
}

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