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Title: Method of drying passivated micromachines by dewetting from a liquid-based process

Abstract

A method of fabricating a micromachine includes the step of constructing a low surface energy film on the micromachine. The micromachine is then rinsed with a rinse liquid that has a high surface energy, relative to the low surface energy film, to produce a contact angle of greater than 90.degree. between the low surface energy film and the rinse liquid. This relatively large contact angle causes any rinse liquid on the micromachine to be displaced from the micromachine when the micromachine is removed from the rinse liquid. In other words, the micromachine is dried by dewetting from a liquid-based process. Thus, a separate evaporative drying step is not required, as the micromachine is removed from the liquid-based process in a dry state. The relatively large contact angle also operates to prevent attractive capillary forces between micromachine components, thereby preventing contact and adhesion between adjacent microstructure surfaces. The low surface energy film may be constructed with a fluorinated self-assembled monolayer film. The processing of the invention avoids the use of environmentally harmful, health-hazardous chemicals.

Inventors:
 [1];  [2];  [3];  [1]
  1. (Berkeley, CA)
  2. (Lafayette, CA)
  3. (Orinda, CA)
Publication Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
873213
Patent Number(s):
US 6114044
Assignee:
Regents of University of California (Oakland, CA) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; drying; passivated; micromachines; dewetting; liquid-based; process; fabricating; micromachine; step; constructing; surface; energy; film; rinsed; rinse; liquid; relative; produce; contact; angle; 90; degree; relatively; causes; displaced; removed; words; dried; separate; evaporative; required; dry; operates; prevent; attractive; capillary; forces; components; preventing; adhesion; adjacent; microstructure; surfaces; constructed; fluorinated; self-assembled; monolayer; processing; avoids; environmentally; harmful; health-hazardous; chemicals; surface energy; capillary forces; contact angle; evaporative drying; drying step; monolayer film; self-assembled monolayer; machine components; /428/216/310/427/

Citation Formats

Houston, Michael R., Howe, Roger T., Maboudian, Roya, and Srinivasan, Uthara. Method of drying passivated micromachines by dewetting from a liquid-based process. United States: N. p., 2000. Web.
Houston, Michael R., Howe, Roger T., Maboudian, Roya, & Srinivasan, Uthara. Method of drying passivated micromachines by dewetting from a liquid-based process. United States.
Houston, Michael R., Howe, Roger T., Maboudian, Roya, and Srinivasan, Uthara. Sat . "Method of drying passivated micromachines by dewetting from a liquid-based process". United States. https://www.osti.gov/servlets/purl/873213.
@article{osti_873213,
title = {Method of drying passivated micromachines by dewetting from a liquid-based process},
author = {Houston, Michael R. and Howe, Roger T. and Maboudian, Roya and Srinivasan, Uthara},
abstractNote = {A method of fabricating a micromachine includes the step of constructing a low surface energy film on the micromachine. The micromachine is then rinsed with a rinse liquid that has a high surface energy, relative to the low surface energy film, to produce a contact angle of greater than 90.degree. between the low surface energy film and the rinse liquid. This relatively large contact angle causes any rinse liquid on the micromachine to be displaced from the micromachine when the micromachine is removed from the rinse liquid. In other words, the micromachine is dried by dewetting from a liquid-based process. Thus, a separate evaporative drying step is not required, as the micromachine is removed from the liquid-based process in a dry state. The relatively large contact angle also operates to prevent attractive capillary forces between micromachine components, thereby preventing contact and adhesion between adjacent microstructure surfaces. The low surface energy film may be constructed with a fluorinated self-assembled monolayer film. The processing of the invention avoids the use of environmentally harmful, health-hazardous chemicals.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {1}
}

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