Fusion bonding and alignment fixture

Patent · Sat Jan 01 00:00:00 EST 2000

OSTI ID:873061

Ackler, Harold D ^[1]; Swierkowski, Stefan P ^[2]; Tarte, Lisa A ^[2]; Hicks, Randall K ^[3]

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1. Sunnyvale, CA
2. Livermore, CA
3. Stockton, CA

An improved vacuum fusion bonding structure and process for aligned bonding of large area glass plates, patterned with microchannels and access holes and slots, for elevated glass fusion temperatures. Vacuum pumpout of all the components is through the bottom platform which yields an untouched, defect free top surface which greatly improves optical access through this smooth surface. Also, a completely non-adherent interlayer, such as graphite, with alignment and location features is located between the main steel platform and the glass plate pair, which makes large improvements in quality, yield, and ease of use, and enables aligned bonding of very large glass structures.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Regents of University of California (Oakland, CA)
• Patent Number(s): US 6082140
• OSTI ID: 873061
• Country of Publication: United States
• Language: English

Related Subjects

fusion
bonding
alignment
fixture
improved
vacuum
structure
process
aligned
glass
plates
patterned
microchannels
access
holes
slots
elevated
temperatures
pumpout
components
bottom
platform
yields
untouched
defect
free
top
surface
greatly
improves
optical
smooth
completely
non-adherent
interlayer
graphite
location
features
located
main
steel
plate
pair
makes
improvements
quality
yield
ease
enables
structures
vacuum pumpout
alignment fixture
vacuum fusion
defect free
optical access
smooth surface
top surface
glass plates
vacuum pump
fusion bonding
glass plate
aligned bonding
greatly improves
glass structures
improved vacuum
glass fusion
fusion bond
fusion temperatures
elevated glass
access holes
bonding structure
/65/156/228/425/