Method for surface passivation and protection of cadmium zinc telluride crystals
- 5640 Hobart St., Apt. #9, Pittsburg, PA 15217
- 5420 Lenore Ave., Livermore, CA 94550
- 8 Carleton Dr., Mount Lebanon, PA 15243
- 3707 Carrigan Common, Livermore, CA 94550
A method for reducing the leakage current in CZT crystals, particularly Cd.sub.1-x Zn.sub.x Te crystals (where x is greater than equal to zero and less than or equal to 0.5), and preferably Cd.sub.0.9 Zn.sub.0.1 Te crystals, thereby enhancing the ability of these crystal to spectrally resolve radiological emissions from a wide variety of radionuclides. Two processes are disclosed. The first method provides for depositing, via reactive sputtering, a silicon nitride hard-coat overlayer which provides significant reduction in surface leakage currents. The second method enhances the passivation by oxidizing the CZT surface with an oxygen plasma prior to silicon nitride deposition without breaking the vacuum state.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Mescher, Mark J. (5640 Hobart St., Apt. #9, Pittsburg, PA 15217);James, Ralph B. (5420 Lenore Ave., Livermore, CA 94550);Schlesinger, Tuviah E. (8 Carleton Dr., Mount Lebanon, PA 15243);Hermon, Haim (3707 Carrigan Common, Livermore, CA 94550)
- Patent Number(s):
- US 6043106
- OSTI ID:
- 872930
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
surface
passivation
protection
cadmium
zinc
telluride
crystals
reducing
leakage
current
czt
particularly
cd
1-x
zn
equal
zero
preferably
enhancing
ability
crystal
spectrally
resolve
radiological
emissions
wide
variety
radionuclides
processes
disclosed
provides
depositing
via
reactive
sputtering
silicon
nitride
hard-coat
overlayer
significant
reduction
currents
enhances
oxidizing
oxygen
plasma
prior
deposition
breaking
vacuum
reactive sputtering
surface passivation
leakage currents
surface leakage
significant reduction
silicon nitride
wide variety
method provides
cadmium zinc
leakage current
method provide
oxygen plasma
zinc telluride
czt crystal
telluride crystal
surface pass
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