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Title: Capacitively coupled RF diamond-like-carbon reactor

Abstract

A process of coating a non-conductive fiber with diamond-like carbon, including passing a non-conductive fiber between a pair of parallel metal grids within a reaction chamber, introducing a hydrocarbon gas into the reaction chamber, forming a plasma within the reaction chamber for a sufficient period of time whereby diamond-like carbon is formed upon the non-conductive fiber, is provided together with a reactor chamber for deposition of diamond-like carbon upon a non-conductive fiber, including a vacuum chamber, a cathode assembly including a pair of electrically isolated opposingly parallel metal grids spaced apart at a distance of less than about 1 centimeter, an anode, a means of introducing a hydrocarbon gas into said vacuum chamber, and a means of generating a plasma within said vacuum chamber.

Inventors:
 [1];  [2];  [3];  [4]
  1. Los Alamos, NM
  2. Santa Fe, NM
  3. Espanola, NM
  4. Santa Cruz, NM
Publication Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
OSTI Identifier:
872906
Patent Number(s):
US 6037016
Assignee:
E.I. du Pont de Nemours and Company (Wilmington, DE); Regents of University of California (Oakland, CA)
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
capacitively; coupled; rf; diamond-like-carbon; reactor; process; coating; non-conductive; fiber; diamond-like; carbon; including; passing; pair; parallel; metal; grids; reaction; chamber; introducing; hydrocarbon; gas; forming; plasma; sufficient; period; time; whereby; formed; provided; deposition; vacuum; cathode; assembly; electrically; isolated; opposingly; spaced; apart; distance; centimeter; anode; means; generating; capacitively coupled; electrically isolated; diamond-like carbon; hydrocarbon gas; vacuum chamber; reaction chamber; spaced apart; assembly including; cathode assembly; reactor chamber; sufficient period; metal grids; non-conductive fiber; electrically isolate; parallel metal; including passing; metal grid; coupled rf; /427/118/

Citation Formats

Devlin, David James, Coates, Don Mayo, Archuleta, Thomas Arthur, and Barbero, Robert Steven. Capacitively coupled RF diamond-like-carbon reactor. United States: N. p., 2000. Web.
Devlin, David James, Coates, Don Mayo, Archuleta, Thomas Arthur, & Barbero, Robert Steven. Capacitively coupled RF diamond-like-carbon reactor. United States.
Devlin, David James, Coates, Don Mayo, Archuleta, Thomas Arthur, and Barbero, Robert Steven. 2000. "Capacitively coupled RF diamond-like-carbon reactor". United States. https://www.osti.gov/servlets/purl/872906.
@article{osti_872906,
title = {Capacitively coupled RF diamond-like-carbon reactor},
author = {Devlin, David James and Coates, Don Mayo and Archuleta, Thomas Arthur and Barbero, Robert Steven},
abstractNote = {A process of coating a non-conductive fiber with diamond-like carbon, including passing a non-conductive fiber between a pair of parallel metal grids within a reaction chamber, introducing a hydrocarbon gas into the reaction chamber, forming a plasma within the reaction chamber for a sufficient period of time whereby diamond-like carbon is formed upon the non-conductive fiber, is provided together with a reactor chamber for deposition of diamond-like carbon upon a non-conductive fiber, including a vacuum chamber, a cathode assembly including a pair of electrically isolated opposingly parallel metal grids spaced apart at a distance of less than about 1 centimeter, an anode, a means of introducing a hydrocarbon gas into said vacuum chamber, and a means of generating a plasma within said vacuum chamber.},
doi = {},
url = {https://www.osti.gov/biblio/872906}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2000},
month = {1}
}

Works referenced in this record:

DLC films by plasma assisted chemical vapor deposition near room temperature
journal, November 1993


Diamond-like carbon thin film deposition using a magnetically confined r.f. PECVD system
journal, May 1995


Room-temperature deposition of diamond-like carbon films by the microwave plasma jet method
journal, January 1994