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Title: Rigid thin windows for vacuum applications

Abstract

A thin window that stands off atmospheric pressure is fabricated using photolithographic and wet chemical etching techniques and comprises at least two layers: an etch stop layer and a protective barrier layer. The window structure also comprises a series of support ribs running the width of the window. The windows are typically made of boron-doped silicon and silicon nitride and are useful in instruments such as electron beam guns and x-ray detectors. In an electron beam gun, the window does not impede the electrons and has demonstrated outstanding gun performance and survivability during the gun tube manufacturing process.

Inventors:
 [1];  [2];  [2];  [3];  [4]
  1. (Danville, CA)
  2. (Livermore, CA)
  3. (Lafayette, CA)
  4. (Pacific Palisades, CA)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
872758
Patent Number(s):
US 6002202
Assignee:
Regents of University of California (Oakland, CA) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
rigid; windows; vacuum; applications; window; stands; atmospheric; pressure; fabricated; photolithographic; wet; chemical; etching; techniques; comprises; layers; etch; stop; layer; protective; barrier; structure; series; support; ribs; running; width; typically; boron-doped; silicon; nitride; useful; instruments; electron; beam; guns; x-ray; detectors; gun; impede; electrons; demonstrated; outstanding; performance; survivability; tube; manufacturing; process; etch stop; x-ray detector; manufacturing process; chemical etching; top layer; silicon nitride; electron beam; atmospheric pressure; barrier layer; doped silicon; wet chemical; stop layer; protective barrier; etching techniques; beam gun; ray detector; vacuum applications; window structure; /313/378/

Citation Formats

Meyer, Glenn Allyn, Ciarlo, Dino R., Myers, Booth Richard, Chen, Hao-Lin, and Wakalopulos, George. Rigid thin windows for vacuum applications. United States: N. p., 1999. Web.
Meyer, Glenn Allyn, Ciarlo, Dino R., Myers, Booth Richard, Chen, Hao-Lin, & Wakalopulos, George. Rigid thin windows for vacuum applications. United States.
Meyer, Glenn Allyn, Ciarlo, Dino R., Myers, Booth Richard, Chen, Hao-Lin, and Wakalopulos, George. Fri . "Rigid thin windows for vacuum applications". United States. doi:. https://www.osti.gov/servlets/purl/872758.
@article{osti_872758,
title = {Rigid thin windows for vacuum applications},
author = {Meyer, Glenn Allyn and Ciarlo, Dino R. and Myers, Booth Richard and Chen, Hao-Lin and Wakalopulos, George},
abstractNote = {A thin window that stands off atmospheric pressure is fabricated using photolithographic and wet chemical etching techniques and comprises at least two layers: an etch stop layer and a protective barrier layer. The window structure also comprises a series of support ribs running the width of the window. The windows are typically made of boron-doped silicon and silicon nitride and are useful in instruments such as electron beam guns and x-ray detectors. In an electron beam gun, the window does not impede the electrons and has demonstrated outstanding gun performance and survivability during the gun tube manufacturing process.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Jan 01 00:00:00 EST 1999},
month = {Fri Jan 01 00:00:00 EST 1999}
}

Patent:

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