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Title: Optical filter including a sub-wavelength periodic structure and method of making

Patent ·
OSTI ID:871416
 [1];  [1]
  1. Albuquerque, NM
+ Show Author Affiliations

An optical filter includes a dielectric layer formed within a resonant optical cavity, with the dielectric layer having formed therein a sub-wavelength periodic structure to define, at least in part, a wavelength for transmission of light through the resonant optical cavity. The sub-wavelength periodic structure can be formed either by removing material from the dielectric layer (e.g. by etching through an electron-beam defined mask), or by altering the composition of the layer (e.g. by ion implantation). Different portions of the dielectric layer can be patterned to form one or more optical interference filter elements having different light transmission wavelengths so that the optical filter can filter incident light according to wavelength and/or polarization. For some embodiments, the optical filter can include a detector element in optical alignment with each optical interference filter element to quantify or measure the filtered light for analysis thereof. The optical filter has applications to spectrometry, colorimetry, and chemical sensing.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
US 5726805
OSTI ID:
871416
Country of Publication:
United States
Language:
English

References (8)

Submicrometer periodicity gratings as artificial anisotropic dielectrics journal March 1983
Antireflection effect in ultrahigh spatial-frequency holographic relief gratings journal January 1987
Antireflection gold surface-relief gratings: experimental characteristics journal January 1988
Optical elements with ultrahigh spatial-frequency surface corrugations journal January 1983
Two-dimensional array of optical interference filters produced by lithographic alterations of the index of refraction
  • Kaushik, Sumanth; Stallard, Brian R.
  • SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, SPIE Proceedings https://doi.org/10.1117/12.221254
conference September 1995
New principle for optical filters journal August 1992
Analysis of antireflection-structured surfaces with continuous one-dimensional surface profiles journal January 1993
Near-IR Reflectance Spectroscopy for the Determination of Motor Oil Contamination in Sandy Loam journal March 1996

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optical
filter
including
sub-wavelength
periodic
structure
method
dielectric
layer
formed
resonant
cavity
therein
define
wavelength
transmission
light
removing
material
etching
electron-beam
defined
mask
altering
composition
implantation
portions
patterned
form
interference
elements
wavelengths
incident
according
polarization
embodiments
detector
element
alignment
quantify
measure
filtered
analysis
applications
spectrometry
colorimetry
chemical
sensing
chemical sensing
light transmission
optical alignment
resonant optical
removing material
incident light
filter elements
layer formed
interference filter
optical filter
formed therein
dielectric layer
filter element
optical cavity
detector element
sub-wavelength periodic
optical interference
periodic structure
filter including
filtered light
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