Boron containing multilayer coatings and method of fabrication

Patent · 01 January 1997

OSTI ID:871154

Makowiecki, Daniel M ^[1]; Jankowski, Alan F ^[1]

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1. Livermore, CA

Hard coatings are fabricated from multilayer boron/boron carbide, boron carbide/cubic boron nitride, and boron/boron nitride/boron carbide, and the fabrication thereof involves magnetron sputtering in a selected atmosphere. These hard coatings may be applied to tools and engine and other parts, as well to reduce wear on tribological surfaces and electronic devices. These boron coatings contain no morphological growth features. For example, the boron and boron carbide used in forming the multilayers are formed in an inert (e.g. argon) atmosphere, while the cubic boron nitride is formed in a reactive (e.g. nitrogen) atmosphere. The multilayer boron/boron carbide, and boron carbide/cubic boron nitride is produced by depositing alternate layers of boron, cubic boron nitride or boron carbide, with the alternate layers having a thickness of 1 nanometer to 1 micrometer, and at least the interfaces of the layers may be of a discrete or a blended or graded composition.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA
• DOE Contract Number: W-7405-ENG-48
• Assignee: Regents of University of California (Oakland, CA)
• Patent Number(s): US 5670252
• OSTI ID: 871154
• Country of Publication: United States
• Language: English

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alternate
alternate layers
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argon
atmosphere
blended
boron
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boron containing
boron nitride
carbide
coatings
composition
contain
containing
cubic
cubic boron
depositing
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devices
discrete
electronic
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electronic devices
engine
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fabricated
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graded
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hard
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inert
interfaces
involves
involves magnetron
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magnetron sputtering
method
micrometer
morphological
morphological growth
multilayer
multilayer boron
multilayer coating
multilayer coatings
multilayers
nanometer
nitride
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produced
reactive
reduce
reduce wear
selected
selected atmosphere
sputtering
surfaces
thickness
tools
tribological
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