Boron containing multilayer coatings and method of fabrication

Patent · Wed Jan 01 00:00:00 EST 1997

OSTI ID:871154

Makowiecki, Daniel M ^[1]; Jankowski, Alan F ^[1]

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1. Livermore, CA

Hard coatings are fabricated from multilayer boron/boron carbide, boron carbide/cubic boron nitride, and boron/boron nitride/boron carbide, and the fabrication thereof involves magnetron sputtering in a selected atmosphere. These hard coatings may be applied to tools and engine and other parts, as well to reduce wear on tribological surfaces and electronic devices. These boron coatings contain no morphological growth features. For example, the boron and boron carbide used in forming the multilayers are formed in an inert (e.g. argon) atmosphere, while the cubic boron nitride is formed in a reactive (e.g. nitrogen) atmosphere. The multilayer boron/boron carbide, and boron carbide/cubic boron nitride is produced by depositing alternate layers of boron, cubic boron nitride or boron carbide, with the alternate layers having a thickness of 1 nanometer to 1 micrometer, and at least the interfaces of the layers may be of a discrete or a blended or graded composition.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Regents of University of California (Oakland, CA)
• Patent Number(s): US 5670252
• OSTI ID: 871154
• Country of Publication: United States
• Language: English

Related Subjects

boron
containing
multilayer
coatings
method
fabrication
hard
fabricated
carbide
cubic
nitride
involves
magnetron
sputtering
selected
atmosphere
applied
tools
engine
reduce
wear
tribological
surfaces
electronic
devices
contain
morphological
growth
features
example
forming
multilayers
formed
inert
argon
reactive
nitrogen
produced
depositing
alternate
layers
thickness
nanometer
micrometer
interfaces
discrete
blended
graded
composition
multilayer coatings
magnetron sputter
morphological growth
multilayer coating
magnetron sputtering
cubic boron
boron containing
alternate layers
boron carbide
boron nitride
electronic devices
selected atmosphere
reduce wear
multilayer boron
hard coatings
growth features
electronic device
hard coating
graded composition
depositing alternate
involves magnetron
/428/359/