Moving zone Marangoni drying of wet objects using naturally evaporated solvent vapor
- Oakley, CA
A surface tension gradient driven flow (a Marangoni flow) is used to remove the thin film of water remaining on the surface of an object following rinsing. The process passively introduces by natural evaporation and diffusion of minute amounts of alcohol (or other suitable material) vapor in the immediate vicinity of a continuously refreshed meniscus of deionized water or another aqueous-based, nonsurfactant rinsing agent. Used in conjunction with cleaning, developing or wet etching application, rinsing coupled with Marangoni drying provides a single-step process for 1) cleaning, developing or etching, 2) rinsing, and 3) drying objects such as flat substrates or coatings on flat substrates without necessarily using heat, forced air flow, contact wiping, centrifugation or large amounts of flammable solvents. This process is useful in one-step cleaning and drying of large flat optical substrates, one-step developing/rinsing and drying or etching/rinsing/drying of large flat patterned substrates and flat panel displays during lithographic processing, and room-temperature rinsing/drying of other large parts, sheets or continuous rolls of material.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Number(s):
- US 5660642
- OSTI ID:
- 871112
- Country of Publication:
- United States
- Language:
- English
Marangoni drying: A new extremely clean drying process
|
journal | November 1990 |
On Marangoni drying: nonlinear kinematic waves in a thin film
|
journal | September 1993 |
Motion of Marangoni-contracted water drops across inclined hydrophilic surfaces
|
journal | November 1991 |
Ultraclean Marangoni Drying
|
book | January 1993 |
Physical principles of Marangoni drying
|
journal | November 1991 |
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zone
marangoni
drying
wet
naturally
evaporated
solvent
vapor
surface
tension
gradient
driven
flow
remove
film
water
remaining
following
rinsing
process
passively
introduces
natural
evaporation
diffusion
minute
amounts
alcohol
suitable
material
immediate
vicinity
continuously
refreshed
meniscus
deionized
aqueous-based
nonsurfactant
agent
conjunction
cleaning
developing
etching
application
coupled
provides
single-step
flat
substrates
coatings
necessarily
heat
forced
air
contact
wiping
centrifugation
flammable
solvents
useful
one-step
optical
patterned
panel
displays
lithographic
processing
room-temperature
sheets
continuous
rolls
optical substrates
forced air
suitable material
air flow
flat panel
surface tension
deionized water
optical substrate
panel displays
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wet etching
water remaining
step process
solvent vapor
single-step process
patterned substrate
minute amounts
flat substrates
lithographic processing
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