Method and device for predicting wavelength dependent radiation influences in thermal systems
Patent
·
OSTI ID:870737
- 864 Lucille St., Livermore, CA 94550
- 7329 Stonedale Dr., Pleasanton, CA 94558
A method and apparatus for predicting the spectral (wavelength-dependent) radiation transport in thermal systems including interaction by the radiation with partially transmitting medium. The predicted model of the thermal system is used to design and control the thermal system. The predictions are well suited to be implemented in design and control of rapid thermal processing (RTP) reactors. The method involves generating a spectral thermal radiation transport model of an RTP reactor. The method also involves specifying a desired wafer time dependent temperature profile. The method further involves calculating an inverse of the generated model using the desired wafer time dependent temperature to determine heating element parameters required to produce the desired profile. The method also involves controlling the heating elements of the RTP reactor in accordance with the heating element parameters to heat the wafer in accordance with the desired profile.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA
- Assignee:
- Kee, Robert J. (864 Lucille St., Livermore, CA 94550);Ting, Aili (7329 Stonedale Dr., Pleasanton, CA 94558)
- Patent Number(s):
- US 5583780
- OSTI ID:
- 870737
- Country of Publication:
- United States
- Language:
- English
Simulation of Rapid Thermal Processing Equipment and Processes
|
journal | January 1993 |
| The influence of wavelength-dependent radiation in simulation of lamp-heated rapid thermal processing systems | report | August 1994 |
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thermal systems
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control
controlling
dependent
design
desired
determine
device
element
elements
generated
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heat
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implemented
including
influences
interaction
inverse
involves
involves calculating
medium
method
method involve
method involves
model
parameters
partially
predicted
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predictions
processing
produce
profile
radiation
radiation transport
rapid
rapid thermal
reactor
reactors
required
rtp
specifying
spectral
suited
systems
systems including
temperature
temperature profile
thermal
thermal processing
thermal radiation
thermal systems
time
time dependent
transmitting
transmitting medium
transport
wafer
wavelength
wavelength dependent
wavelength-dependent