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Title: Optical processing furnace with quartz muffle and diffuser plate

Abstract

An optical furnace for annealing a process wafer comprising a source of optical energy, a quartz muffle having a door to hold the wafer for processing, and a quartz diffuser plate to diffuse the light impinging on the quartz muffle; a feedback system with a light sensor located in the wall of the muffle is also provided for controlling the source of optical energy.

Inventors:
 [1]
  1. Denver, CO
Publication Date:
Research Org.:
Midwest Research Institute (Kansas City, MO)
Sponsoring Org.:
USDOE
OSTI Identifier:
870695
Patent Number(s):
US 5577157
Assignee:
Midwest Research Institute (Kansas City, MO)
DOE Contract Number:  
AC02-83CH10093
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
optical; processing; furnace; quartz; muffle; diffuser; plate; annealing; process; wafer; comprising; source; energy; door; hold; diffuse; light; impinging; feedback; sensor; located; wall; provided; controlling; quartz muffle; diffuser plate; light sensor; optical energy; optical furnace; optical processing; quartz diffuser; light impinging; wafer comprising; optical process; processing furnace; process wafer; /392/118/216/219/250/359/427/438/

Citation Formats

Sopori, Bhushan L. Optical processing furnace with quartz muffle and diffuser plate. United States: N. p., 1996. Web.
Sopori, Bhushan L. Optical processing furnace with quartz muffle and diffuser plate. United States.
Sopori, Bhushan L. Mon . "Optical processing furnace with quartz muffle and diffuser plate". United States. https://www.osti.gov/servlets/purl/870695.
@article{osti_870695,
title = {Optical processing furnace with quartz muffle and diffuser plate},
author = {Sopori, Bhushan L},
abstractNote = {An optical furnace for annealing a process wafer comprising a source of optical energy, a quartz muffle having a door to hold the wafer for processing, and a quartz diffuser plate to diffuse the light impinging on the quartz muffle; a feedback system with a light sensor located in the wall of the muffle is also provided for controlling the source of optical energy.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {1}
}

Patent:

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