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Substrate heater for thin film deposition

Patent ·
OSTI ID:870596
 [1]
  1. 111 Beryl St., Los Alamos, NM 87544
+ Show Author Affiliations

A substrate heater for thin film deposition of metallic oxides upon a target substrate configured as a disk including means for supporting in a predetermined location a target substrate configured as a disk, means for rotating the target substrate within the support means, means for heating the target substrate within the support means, the heating means about the support means and including a pair of heating elements with one heater element situated on each side of the predetermined location for the target substrate, with one heater element defining an opening through which desired coating material can enter for thin film deposition and with the heating means including an opening slot through which the target substrate can be entered into the support means, and, optionally a means for thermal shielding of the heating means from surrounding environment is disclosed.

Research Organization:
Los Alamos National Laboratory (LANL), Los Alamos, NM
DOE Contract Number:
W-7405-ENG-36
Assignee:
Foltyn, Steve R. (111 Beryl St., Los Alamos, NM 87544)
Patent Number(s):
US 5554224
OSTI ID:
870596
Country of Publication:
United States
Language:
English

References (7)

Off‐axis laser deposition of YBa 2 Cu 3 O 7−δ thin films journal December 1992
A versatile substrate heater for use in highly oxidizing atmospheres journal February 1991
Double gun off-axis sputtering of large area YBa/sub 2/Cu/sub 3/O/sub 7- delta / superconducting films for microwave applications journal March 1991
Large‐area, two‐sided superconducting YBa 2 Cu 3 O 7− x films deposited by pulsed laser deposition journal September 1991
Pulsed-laser deposition of oxides over large areas conference March 1991
Deposition of high quality YBa 2 Cu 3 O 7−δ thin films over large areas by pulsed laser ablation with substrate scanning journal May 1991
Large-area YBCO films for microwave applications journal March 1991

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Related Subjects

/118/204/
coating
coating material
configured
defining
deposition
desired
disclosed
disk
disk including
element
elements
enter
entered
environment
film
film deposition
heater
heater element
heating
heating element
heating elements
heating means
including
including means
location
material
means
means including
metallic
metallic oxide
metallic oxides
optionally
oxides
pair
predetermined
predetermined location
rotating
shielding
situated
slot
substrate
substrate configured
substrate heater
support
support means
supporting
surrounding
surrounding environment
target
target substrate
thermal
thermal shield