High resolution EUV monochromator/spectrometer
- Moraga, CA
This invention is related to a monochromator which employs a spherical mirror, a traveling plane mirror with simultaneous rotation, and a varied spacing plane grating. The divergent beam from the entrance slit is converged by the spherical mirror located at the various positions in the monochromator depending of the inventive system. To provide the meaningful diffraction efficiencies and to reduce unwanted higher order lights, the deviation angle subtending the incidence and diffraction beams for the plane grating is varied with the position of the traveling plane mirror with simultaneous rotation located in the front or back of the plane grating with wavelength scanning. The outgoing beam from the monochromator goes through the fixed exit slit and has same beam direction regardless of the scanning wavelength. The combination of properly designed motions of the plane mirror and novel varied-spacing parameters of the inventive plane grating corrects the aberrations and focuses the monochromatic spectral image on the exit slit, enabling measurements at high spectral resolution.
- Research Organization:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- DOE Contract Number:
- AC03-76SF00098
- Assignee:
- Regents, University of California (Oakland, CA)
- Patent Number(s):
- US 5528364
- OSTI ID:
- 870481
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
euv
monochromator
spectrometer
related
employs
spherical
mirror
traveling
plane
simultaneous
rotation
varied
spacing
grating
divergent
beam
entrance
slit
converged
located
various
positions
depending
inventive
provide
meaningful
diffraction
efficiencies
reduce
unwanted
lights
deviation
angle
subtending
incidence
beams
position
front
wavelength
scanning
outgoing
fixed
exit
direction
regardless
combination
properly
designed
motions
novel
varied-spacing
parameters
corrects
aberrations
focuses
monochromatic
spectral
image
enabling
measurements
plane grating
plane mirror
beam direction
spherical mirror
spectral image
various positions
mirror located
entrance slit
outgoing beam
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