X-ray transmissive debris shield

Patent · Mon Jan 01 00:00:00 EST 1996

OSTI ID:870431

Spielman, Rick B ^[1]

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1. Albuquerque, NM

An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.

• Research Organization: AT&T
• DOE Contract Number: AC04-76DP00789
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 5519752
• OSTI ID: 870431
• Country of Publication: United States
• Language: English

Related Subjects

x-ray
transmissive
debris
shield
lithography
comprised
window
layer
density
foam
exhibits
increased
longevity
substantial
increase
exposure
time
serves
absorb
emitted
source
attenuate
shock
reduce
chance
breakage
x-rays
hardly
attenuated
substantially
substantial increase
layer serves
density foam
substantially increased
x-ray lithography
x-ray source
exposure time
transmissive debris
substantially increase
x-ray transmissive
debris shield
exhibits increased
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