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Title: X-ray transmissive debris shield

Abstract

An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.

Inventors:
 [1]
  1. (Albuquerque, NM)
Publication Date:
Research Org.:
AT & T CORP
OSTI Identifier:
870431
Patent Number(s):
US 5519752
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
x-ray; transmissive; debris; shield; lithography; comprised; window; layer; density; foam; exhibits; increased; longevity; substantial; increase; exposure; time; serves; absorb; emitted; source; attenuate; shock; reduce; chance; breakage; x-rays; hardly; attenuated; substantially; substantial increase; layer serves; density foam; substantially increased; x-ray lithography; x-ray source; exposure time; transmissive debris; substantially increase; x-ray transmissive; debris shield; exhibits increased; /378/

Citation Formats

Spielman, Rick B. X-ray transmissive debris shield. United States: N. p., 1996. Web.
Spielman, Rick B. X-ray transmissive debris shield. United States.
Spielman, Rick B. Mon . "X-ray transmissive debris shield". United States. doi:. https://www.osti.gov/servlets/purl/870431.
@article{osti_870431,
title = {X-ray transmissive debris shield},
author = {Spielman, Rick B.},
abstractNote = {An X-ray debris shield for use in X-ray lithography that is comprised of an X-ray window having a layer of low density foam exhibits increased longevity without a substantial increase in exposure time. The low density foam layer serves to absorb the debris emitted from the X-ray source and attenuate the shock to the window so as to reduce the chance of breakage. Because the foam is low density, the X-rays are hardly attenuated by the foam and thus the exposure time is not substantially increased.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 1996},
month = {Mon Jan 01 00:00:00 EST 1996}
}

Patent:

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