Simultaneous specimen and stage cleaning device for analytical electron microscope

Patent · 01 January 1996

OSTI ID:870386

Zaluzec, Nestor J ^[1]

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1. Bolingbrook, IL

An improved method and apparatus are provided for cleaning both a specimen stage, a specimen and an interior of an analytical electron microscope (AEM). The apparatus for cleaning a specimen stage and specimen comprising a plasma chamber for containing a gas plasma and an air lock coupled to the plasma chamber for permitting passage of the specimen stage and specimen into the plasma chamber and maintaining an airtight chamber. The specimen stage and specimen are subjected to a reactive plasma gas that is either DC or RF excited. The apparatus can be mounted on the analytical electron microscope (AEM) for cleaning the interior of the microscope.

• Research Organization: Argonne National Laboratory (ANL), Argonne, IL
• DOE Contract Number: W-31109-ENG-38
• Assignee: University of Chicago (Chicago, IL)
• Patent Number(s): US 5510624
• OSTI ID: 870386
• Country of Publication: United States
• Language: English

Related Subjects

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active plasma
aem
air
air lock
airtight
analytical
analytical electron
apparatus
chamber
cleaning
cleaning device
comprising
containing
coupled
dc
device
electron
electron microscope
excited
gas
gas plasma
improved
improved method
interior
lock
maintaining
method
microscope
mounted
passage
permitting
permitting passage
plasma
plasma chamber
plasma gas
provided
reactive
reactive plasma
rf
simultaneous
simultaneous specimen
specimen
specimen comprising
specimen stage
stage
subjected
tight chamber