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Title: Simultaneous specimen and stage cleaning device for analytical electron microscope

Abstract

An improved method and apparatus are provided for cleaning both a specimen stage, a specimen and an interior of an analytical electron microscope (AEM). The apparatus for cleaning a specimen stage and specimen comprising a plasma chamber for containing a gas plasma and an air lock coupled to the plasma chamber for permitting passage of the specimen stage and specimen into the plasma chamber and maintaining an airtight chamber. The specimen stage and specimen are subjected to a reactive plasma gas that is either DC or RF excited. The apparatus can be mounted on the analytical electron microscope (AEM) for cleaning the interior of the microscope.

Inventors:
 [1]
  1. (Bolingbrook, IL)
Publication Date:
Research Org.:
Argonne National Laboratory (ANL), Argonne, IL
OSTI Identifier:
870386
Patent Number(s):
US 5510624
Assignee:
University of Chicago (Chicago, IL) ANL
DOE Contract Number:  
W-31109-ENG-38
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
simultaneous; specimen; stage; cleaning; device; analytical; electron; microscope; improved; method; apparatus; provided; interior; aem; comprising; plasma; chamber; containing; gas; air; lock; coupled; permitting; passage; maintaining; airtight; subjected; reactive; dc; rf; excited; mounted; air lock; electron microscope; improved method; specimen stage; plasma gas; plasma chamber; cleaning device; reactive plasma; permitting passage; analytical electron; specimen comprising; simultaneous specimen; gas plasma; tight chamber; active plasma; /250/

Citation Formats

Zaluzec, Nestor J. Simultaneous specimen and stage cleaning device for analytical electron microscope. United States: N. p., 1996. Web.
Zaluzec, Nestor J. Simultaneous specimen and stage cleaning device for analytical electron microscope. United States.
Zaluzec, Nestor J. Mon . "Simultaneous specimen and stage cleaning device for analytical electron microscope". United States. doi:. https://www.osti.gov/servlets/purl/870386.
@article{osti_870386,
title = {Simultaneous specimen and stage cleaning device for analytical electron microscope},
author = {Zaluzec, Nestor J.},
abstractNote = {An improved method and apparatus are provided for cleaning both a specimen stage, a specimen and an interior of an analytical electron microscope (AEM). The apparatus for cleaning a specimen stage and specimen comprising a plasma chamber for containing a gas plasma and an air lock coupled to the plasma chamber for permitting passage of the specimen stage and specimen into the plasma chamber and maintaining an airtight chamber. The specimen stage and specimen are subjected to a reactive plasma gas that is either DC or RF excited. The apparatus can be mounted on the analytical electron microscope (AEM) for cleaning the interior of the microscope.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 1996},
month = {Mon Jan 01 00:00:00 EST 1996}
}

Patent:

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