Cooled window for X-rays or charged particles

Patent · 01 January 1996

OSTI ID:870380

Logan, Clinton M ^[1]

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1. Pleasanton, CA

A window that provides good structural integrity and a very high capacity for removal of the heat deposited by x-rays, electrons, or ions, with minimum attenuation of the desired beam. The window is cooled by providing microchannels therein through which a coolant is pumped. For example, the window may be made of silicon with etched microchannels therein and covered by a silicon member. A window made of silicon with a total thickness of 520 .mu.m transmits 96% of the x-rays at an energy of 60 keV, and the transmission is higher than 90% for higher energy photons.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA
• DOE Contract Number: W-7405-ENG-48
• Assignee: Regents of University of California (Oakland, CA)
• Patent Number(s): US 5509046
• OSTI ID: 870380
• Country of Publication: United States
• Language: English

Related Subjects

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attenuation
beam
capacity
channels therein
charged
charged particle
charged particles
coolant
cooled
covered
deposited
desired
desired beam
electrons
energy
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energy photons
etched
example
heat
integrity
kev
microchannels
minimum
particles
photons
provides
providing
pumped
removal
silicon
structural
structural integrity
therein
thickness
total
total thickness
transmission
transmits
window
x-rays