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Title: Apparatus for laser assisted thin film deposition

Abstract

A pulsed laser deposition apparatus uses fiber optics to deliver visible output beams. One or more optical fibers are coupled to one or more laser sources, and delivers visible output beams to a single chamber, to multiple targets in the chamber or to multiple chambers. The laser can run uninterrupted if one of the deposition chambers ceases to operate because other chambers can continue their laser deposition processes. The laser source can be positioned at a remote location relative to the deposition chamber. The use of fiber optics permits multi-plexing. A pulsed visible laser beam is directed at a generally non-perpendicular angle upon the target in the chamber, generating a plume of ions and energetic neutral species. A portion of the plume is deposited on a substrate as a thin film. A pulsed visible output beam with a high pulse repetition frequency is used. The high pulse repetition frequency is greater than 500 Hz, and more preferably, greater than about 1000 Hz. Diamond-like-carbon (DLC) is one of the thin films produced using the apparatus.

Inventors:
 [1];  [2]
  1. (Pleasanton, CA)
  2. (Oakland, CA)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
870291
Patent Number(s):
US 5490912
Assignee:
Regents of University of California (Oakland, CA) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
apparatus; laser; assisted; film; deposition; pulsed; fiber; optics; deliver; visible; output; beams; optical; fibers; coupled; sources; delivers; single; chamber; multiple; targets; chambers; run; uninterrupted; ceases; operate; processes; source; positioned; remote; location; relative; permits; multi-plexing; beam; directed; non-perpendicular; angle; target; generating; plume; energetic; neutral; species; portion; deposited; substrate; pulse; repetition; frequency; 500; hz; preferably; 1000; diamond-like-carbon; dlc; films; produced; deposition chambers; output beams; single chamber; visible laser; film deposition; pulse repetition; fiber optics; deposition chamber; output beam; optical fibers; fiber optic; laser beam; optical fiber; pulsed laser; deposition process; laser source; remote location; repetition frequency; deposition processes; deposition apparatus; laser deposition; visible output; location relative; multiple target; multiple targets; neutral species; films produced; laser sources; /204/118/

Citation Formats

Warner, Bruce E., and McLean, II, William. Apparatus for laser assisted thin film deposition. United States: N. p., 1996. Web.
Warner, Bruce E., & McLean, II, William. Apparatus for laser assisted thin film deposition. United States.
Warner, Bruce E., and McLean, II, William. Mon . "Apparatus for laser assisted thin film deposition". United States. https://www.osti.gov/servlets/purl/870291.
@article{osti_870291,
title = {Apparatus for laser assisted thin film deposition},
author = {Warner, Bruce E. and McLean, II, William},
abstractNote = {A pulsed laser deposition apparatus uses fiber optics to deliver visible output beams. One or more optical fibers are coupled to one or more laser sources, and delivers visible output beams to a single chamber, to multiple targets in the chamber or to multiple chambers. The laser can run uninterrupted if one of the deposition chambers ceases to operate because other chambers can continue their laser deposition processes. The laser source can be positioned at a remote location relative to the deposition chamber. The use of fiber optics permits multi-plexing. A pulsed visible laser beam is directed at a generally non-perpendicular angle upon the target in the chamber, generating a plume of ions and energetic neutral species. A portion of the plume is deposited on a substrate as a thin film. A pulsed visible output beam with a high pulse repetition frequency is used. The high pulse repetition frequency is greater than 500 Hz, and more preferably, greater than about 1000 Hz. Diamond-like-carbon (DLC) is one of the thin films produced using the apparatus.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 1996},
month = {Mon Jan 01 00:00:00 EST 1996}
}

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