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Title: Surface passivation process of compound semiconductor material using UV photosulfidation

Abstract

A method for passivating compound semiconductor surfaces by photolytically disrupting molecular sulfur vapor with ultraviolet radiation to form reactive sulfur which then reacts with and passivates the surface of compound semiconductors.

Inventors:
 [1]
  1. Edgewood, NM
Publication Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA
OSTI Identifier:
870072
Patent Number(s):
US 5451542
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-76
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
surface; passivation; process; compound; semiconductor; material; photosulfidation; method; passivating; surfaces; photolytically; disrupting; molecular; sulfur; vapor; ultraviolet; radiation; form; reactive; reacts; passivates; semiconductors; surface passivation; compound semiconductors; ultraviolet radiation; semiconductor material; semiconductor surface; compound semiconductor; semiconductor surfaces; passivation process; surface pass; /438/

Citation Formats

Ashby, Carol I. H. Surface passivation process of compound semiconductor material using UV photosulfidation. United States: N. p., 1995. Web.
Ashby, Carol I. H. Surface passivation process of compound semiconductor material using UV photosulfidation. United States.
Ashby, Carol I. H. Sun . "Surface passivation process of compound semiconductor material using UV photosulfidation". United States. https://www.osti.gov/servlets/purl/870072.
@article{osti_870072,
title = {Surface passivation process of compound semiconductor material using UV photosulfidation},
author = {Ashby, Carol I. H.},
abstractNote = {A method for passivating compound semiconductor surfaces by photolytically disrupting molecular sulfur vapor with ultraviolet radiation to form reactive sulfur which then reacts with and passivates the surface of compound semiconductors.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {1}
}

Patent:

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