System and method for generating a displacement with ultra-high accuracy using a fabry-perot interferometer
- Knoxville, TN
A system and method for generating a desired displacement of an object, i.e., a target, from a reference position with ultra-high accuracy utilizes a Fabry-Perot etalon having an expandable tube cavity for resolving, with an Iodine stabilized laser, displacements with high accuracy and for effecting (as an actuator) displacements of the target. A mechanical amplifier in the form of a micropositioning stage has a platform and a frame which are movable relative to one another, and the tube cavity of the etalon is connected between the platform and frame so that an adjustment in length of the cavity effects a corresponding, amplified movement of the frame relative to the cavity. Therefore, in order to provide a preselected magnitude of displacement of the stage frame relative to the platform, the etalon tube cavity is adjusted in length by a corresponding amount. The system and method are particularly well-suited for use when calibrating a high accuracy measuring device.
- Research Organization:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Assignee:
- Martin Marietta Energy Systems, Inc. (Oak Ridge, TN)
- Patent Number(s):
- US 5353115
- OSTI ID:
- 869529
- Country of Publication:
- United States
- Language:
- English
Status of a silicon lattice measurement and dissemination exercise
|
conference | January 1990 |
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generating
displacement
ultra-high
accuracy
fabry-perot
interferometer
desired
target
reference
position
utilizes
etalon
expandable
tube
cavity
resolving
iodine
stabilized
laser
displacements
effecting
actuator
mechanical
amplifier
form
micropositioning
stage
platform
frame
movable
relative
connected
adjustment
length
effects
corresponding
amplified
movement
provide
preselected
magnitude
adjusted
amount
particularly
well-suited
calibrating
measuring
device
fabry-perot interferometer
measuring device
movable relative
reference position
preselected magnitude
ultra-high accuracy
corresponding amount
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