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Title: Method for producing high quality thin layer films on substrates

Abstract

A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate.

Inventors:
 [1];  [2];  [3]
  1. Center Moriches, NY
  2. Middle Island, NY
  3. Port Jefferson, NY
Publication Date:
Research Org.:
Associated Universities, Inc., Upton, NY (United States)
OSTI Identifier:
869255
Patent Number(s):
US 5306530
Assignee:
Associated Universities, Inc. (Washington, DC)
DOE Contract Number:  
AC02-76CH00016
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; producing; quality; layer; films; substrates; inorganic; compounds; surface; substrate; disclosed; involves; condensing; mixture; preselected; molecular; precursors; subsequently; inducing; formation; reactive; species; energy; photon; charged; particle; irradiation; react; produce; film; desired; compound; inorganic compounds; organic compound; organic compounds; method involves; charged particle; reactive species; particle irradiation; energy photon; active species; method involve; layer films; /427/

Citation Formats

Strongin, Myron, Ruckman, Mark, and Strongin, Daniel. Method for producing high quality thin layer films on substrates. United States: N. p., 1994. Web.
Strongin, Myron, Ruckman, Mark, & Strongin, Daniel. Method for producing high quality thin layer films on substrates. United States.
Strongin, Myron, Ruckman, Mark, and Strongin, Daniel. 1994. "Method for producing high quality thin layer films on substrates". United States. https://www.osti.gov/servlets/purl/869255.
@article{osti_869255,
title = {Method for producing high quality thin layer films on substrates},
author = {Strongin, Myron and Ruckman, Mark and Strongin, Daniel},
abstractNote = {A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate.},
doi = {},
url = {https://www.osti.gov/biblio/869255}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}