Production of N.sup.+ ions from a multicusp ion beam apparatus
- Hercules, CA
- Berkeley, CA
- Salem, MA
A method of generating a high purity (at least 98%) N.sup.+ ion beam using a multicusp ion source (10) having a chamber (11) formed by a cylindrical chamber wall (12) surrounded by a plurality of magnets (13), a filament (57) centrally disposed in said chamber, a plasma electrode (36) having an extraction orifice (41) at one end of the chamber, a magnetic filter having two parallel magnets (21, 22) spaced from said plasma electrode (36) and dividing the chamber (11) into arc discharge and extraction regions. The method includes ionizing nitrogen gas in the arc discharge region of the chamber (11), maintaining the chamber wall (12) at a positive voltage relative to the filament (57) and at a magnitude for an optimum percentage of N.sup.+ ions in the extracted ion beams, disposing a hot liner (45) within the chamber and near the chamber wall (12) to limit recombination of N.sup.+ ions into the N.sub.2.sup.+ ions, spacing the magnets (21, 22) of the magnetic filter from each other for optimum percentage of N.sup.3 ions in the extracted ion beams, and maintaining a relatively low pressure downstream of the extraction orifice and of a magnitude (preferably within the range of 3-8.times.10.sup.-4 torr) for an optimum percentage of N.sup.+ ions in the extracted ion beam.
- Research Organization:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- DOE Contract Number:
- AC03-76SF00098
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 5198677
- OSTI ID:
- 868720
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
multicusp
beam
apparatus
method
generating
purity
98
source
10
chamber
11
formed
cylindrical
wall
12
surrounded
plurality
magnets
13
filament
57
centrally
disposed
plasma
electrode
36
extraction
orifice
41
magnetic
filter
parallel
21
22
spaced
dividing
discharge
regions
ionizing
nitrogen
gas
region
maintaining
positive
voltage
relative
magnitude
optimum
percentage
extracted
beams
disposing
hot
liner
45
near
limit
recombination
spacing
relatively
pressure
downstream
preferably
range
3-8
times
-4
torr
beam apparatus
nitrogen gas
centrally disposed
magnetic filter
discharge region
chamber wall
cylindrical chamber
positive voltage
plasma electrode
extraction region
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