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Title: UV absorption control of thin film growth

Abstract

A system for monitoring and controlling the rate of growth of thin films in an atmosphere of reactant gases measures the UV absorbance of the atmosphere and calculates the partial pressure of the gases. The flow of reactant gases is controlled in response to the partial pressure.

Inventors:
 [1];  [1];  [1];  [2]
  1. (Albuquerque, NM)
  2. (Hopewell Junction, NY)
Publication Date:
Research Org.:
AT & T CORP
OSTI Identifier:
867908
Patent Number(s):
US 5032435
Assignee:
United States of America as represented by United States (Washington, DC) SNL
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
absorption; control; film; growth; monitoring; controlling; rate; films; atmosphere; reactant; gases; measures; absorbance; calculates; partial; pressure; flow; controlled; response; reactant gases; film growth; partial pressure; reactant gas; /427/118/

Citation Formats

Biefeld, Robert M., Hebner, Gregory A., Killeen, Kevin P., and Zuhoski, Steven P. UV absorption control of thin film growth. United States: N. p., 1991. Web.
Biefeld, Robert M., Hebner, Gregory A., Killeen, Kevin P., & Zuhoski, Steven P. UV absorption control of thin film growth. United States.
Biefeld, Robert M., Hebner, Gregory A., Killeen, Kevin P., and Zuhoski, Steven P. Tue . "UV absorption control of thin film growth". United States. https://www.osti.gov/servlets/purl/867908.
@article{osti_867908,
title = {UV absorption control of thin film growth},
author = {Biefeld, Robert M. and Hebner, Gregory A. and Killeen, Kevin P. and Zuhoski, Steven P.},
abstractNote = {A system for monitoring and controlling the rate of growth of thin films in an atmosphere of reactant gases measures the UV absorbance of the atmosphere and calculates the partial pressure of the gases. The flow of reactant gases is controlled in response to the partial pressure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1991},
month = {1}
}

Patent:

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