(110) Oriented silicon wafer latch accelerometer and process for forming the same

Patent · Mon Jan 01 00:00:00 EST 1990

OSTI ID:867230

Ciarlo, Dino R ^[1]

---

1. Livermore, CA

A method for etching a (110) silicon wafer to produce latching cantilever beams, which bend parallel to the surface of the wafer. The resulting apparatus is also part of the invention.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: United States of America as represented by United States (Washington, DC)
• Patent Number(s): US 4891255
• OSTI ID: 867230
• Country of Publication: United States
• Language: English

Related Subjects

110
oriented
silicon
wafer
latch
accelerometer
process
forming
method
etching
produce
latching
cantilever
beams
bend
parallel
surface
resulting
apparatus
silicon wafer
/428/73/216/