Optical inspection system for cylindrical objects
- Richland, WA
In the inspection of cylindrical objects, particularly O-rings, the object is translated through a field of view and a linear light trace is projected on its surface. An image of the light trace is projected on a mask, which has a size and shape corresponding to the size and shape which the image would have if the surface of the object were perfect. If there is a defect, light will pass the mask and be sensed by a detector positioned behind the mask. Preferably, two masks and associated detectors are used, one mask being convex to pass light when the light trace falls on a projection from the surface and the other concave, to pass light when the light trace falls on a depression in the surface. The light trace may be either dynamic, formed by a scanned laser beam, or static, formed by such a beam focussed by a cylindrical lens. Means are provided to automatically keep the illuminating receiving systems properly aligned.
- Research Organization:
- Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)
- DOE Contract Number:
- 23111 07105
- Assignee:
- Battelle Memorial Institute (Richland, WA)
- Patent Number(s):
- US 4808001
- OSTI ID:
- 866854
- Country of Publication:
- United States
- Language:
- English
Similar Records
Apparatus and method for generating partially coherent illumination for photolithography
Apparatus and method for generating partially coherent illumination for photolithography
Related Subjects
inspection
cylindrical
particularly
o-rings
translated
field
view
linear
light
trace
projected
surface
image
mask
size
shape
corresponding
perfect
defect
pass
sensed
detector
positioned
preferably
masks
associated
detectors
convex
falls
projection
concave
depression
dynamic
formed
scanned
laser
beam
static
focussed
lens
means
provided
automatically
illuminating
receiving
systems
properly
aligned
light trace
cylindrical lens
laser beam
optical inspection
properly aligned
pass light
beam focus
near light
/356/