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Title: Method of processing materials using an inductively coupled plasma

Abstract

A method for coating surfaces or implanting ions in an object using an inductively coupled plasma. The method provides a gas-free environment, since the plasma is formed without using a gas. The coating material or implantation material is intitially in solid form.

Inventors:
 [1];  [1]
  1. Los Alamos, NM
Publication Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
OSTI Identifier:
866809
Patent Number(s):
US 4795879
Assignee:
United States of America as represented by United States (Washington, DC)
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; processing; materials; inductively; coupled; plasma; coating; surfaces; implanting; provides; gas-free; environment; formed; gas; material; implantation; intitially; solid; form; solid form; coating material; inductively coupled; coupled plasma; method provides; method provide; processing materials; coating surface; gas-free environment; /219/315/427/

Citation Formats

Hull, Donald E, and Bieniewski, Thomas M. Method of processing materials using an inductively coupled plasma. United States: N. p., 1989. Web.
Hull, Donald E, & Bieniewski, Thomas M. Method of processing materials using an inductively coupled plasma. United States.
Hull, Donald E, and Bieniewski, Thomas M. Sun . "Method of processing materials using an inductively coupled plasma". United States. https://www.osti.gov/servlets/purl/866809.
@article{osti_866809,
title = {Method of processing materials using an inductively coupled plasma},
author = {Hull, Donald E and Bieniewski, Thomas M},
abstractNote = {A method for coating surfaces or implanting ions in an object using an inductively coupled plasma. The method provides a gas-free environment, since the plasma is formed without using a gas. The coating material or implantation material is intitially in solid form.},
doi = {},
url = {https://www.osti.gov/biblio/866809}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1989},
month = {1}
}

Patent:

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