Variable laser attenuator
Abstract
The disclosure relates to low loss, high power variable attenuators comprng one or more transmissive and/or reflective multilayer dielectric filters. The attenuator is particularly suitable to use with unpolarized lasers such as excimer lasers. Beam attenuation is a function of beam polarization and the angle of incidence between the beam and the filter and is controlled by adjusting the angle of incidence the beam makes to the filter or filters. Filters are selected in accordance with beam wavelength.
- Inventors:
-
- Los Alamos, NM
- Publication Date:
- Research Org.:
- Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
- OSTI Identifier:
- 866742
- Patent Number(s):
- US 4778263
- Assignee:
- United States of America as respresented by Department of Energy (Washington, DC)
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- variable; laser; attenuator; disclosure; relates; loss; power; attenuators; comprng; transmissive; reflective; multilayer; dielectric; filters; particularly; suitable; unpolarized; lasers; excimer; beam; attenuation; function; polarization; angle; incidence; filter; controlled; adjusting; makes; selected; accordance; wavelength; multilayer dielectric; particularly suitable; disclosure relates; polarized laser; excimer laser; excimer lasers; beam wavelength; electric filter; /359/
Citation Formats
Foltyn, Stephen R. Variable laser attenuator. United States: N. p., 1988.
Web.
Foltyn, Stephen R. Variable laser attenuator. United States.
Foltyn, Stephen R. Fri .
"Variable laser attenuator". United States. https://www.osti.gov/servlets/purl/866742.
@article{osti_866742,
title = {Variable laser attenuator},
author = {Foltyn, Stephen R},
abstractNote = {The disclosure relates to low loss, high power variable attenuators comprng one or more transmissive and/or reflective multilayer dielectric filters. The attenuator is particularly suitable to use with unpolarized lasers such as excimer lasers. Beam attenuation is a function of beam polarization and the angle of incidence between the beam and the filter and is controlled by adjusting the angle of incidence the beam makes to the filter or filters. Filters are selected in accordance with beam wavelength.},
doi = {},
url = {https://www.osti.gov/biblio/866742},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1988},
month = {1}
}
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