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Title: Supercritical fluid molecular spray thin films and fine powders

Abstract

Solid films are deposited, or fine powders formed, by dissolving a solid material into a supercritical fluid solution at an elevated pressure and then rapidly expanding the solution through a short orifice into a region of relatively low pressure. This produces a molecular spray which is directed against a substrate to deposit a solid thin film thereon, or discharged into a collection chamber to collect a fine powder. The solvent is vaporized and pumped away. Solution pressure is varied to determine, together with flow rate, the rate of deposition and to control in part whether a film or powder is produced and the granularity of each. Solution temperature is varied in relation to formation of a two-phase system during expansion to control porosity of the film or powder. A wide variety of film textures and powder shapes are produced of both organic and inorganic compounds. Films are produced with regular textural feature dimensions of 1.0-2.0 .mu.m down to a range of 0.01 to 0.1 .mu.m. Powders are formed in very narrow size distributions, with average sizes in the range of 0.02 to 5 .mu.m.

Inventors:
 [1]
  1. (Richland, WA)
Publication Date:
Research Org.:
BATTELLE MEMORIAL INSTITUTE
OSTI Identifier:
866550
Patent Number(s):
US 4734451
Assignee:
Battelle Memorial Institute (Richland, WA) PNNL
DOE Contract Number:  
AC06-76RL01830
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
supercritical; fluid; molecular; spray; films; fine; powders; solid; deposited; formed; dissolving; material; solution; elevated; pressure; rapidly; expanding; orifice; region; relatively; produces; directed; substrate; deposit; film; thereon; discharged; collection; chamber; collect; powder; solvent; vaporized; pumped; varied; determine; flow; rate; deposition; control; produced; granularity; temperature; relation; formation; two-phase; expansion; porosity; wide; variety; textures; shapes; organic; inorganic; compounds; regular; textural; feature; dimensions; 0-2; range; 01; narrow; size; distributions; average; sizes; 02; narrow size; molecular spray; inorganic compounds; rapidly expanding; size distribution; organic compound; supercritical fluid; organic compounds; flow rate; solid material; collection chamber; wide variety; average size; elevated pressure; fine powder; solid films; powders formed; fluid solution; fine powders; film thereon; solid film; fluid molecular; /524/118/210/264/

Citation Formats

Smith, Richard D. Supercritical fluid molecular spray thin films and fine powders. United States: N. p., 1988. Web.
Smith, Richard D. Supercritical fluid molecular spray thin films and fine powders. United States.
Smith, Richard D. Fri . "Supercritical fluid molecular spray thin films and fine powders". United States. https://www.osti.gov/servlets/purl/866550.
@article{osti_866550,
title = {Supercritical fluid molecular spray thin films and fine powders},
author = {Smith, Richard D.},
abstractNote = {Solid films are deposited, or fine powders formed, by dissolving a solid material into a supercritical fluid solution at an elevated pressure and then rapidly expanding the solution through a short orifice into a region of relatively low pressure. This produces a molecular spray which is directed against a substrate to deposit a solid thin film thereon, or discharged into a collection chamber to collect a fine powder. The solvent is vaporized and pumped away. Solution pressure is varied to determine, together with flow rate, the rate of deposition and to control in part whether a film or powder is produced and the granularity of each. Solution temperature is varied in relation to formation of a two-phase system during expansion to control porosity of the film or powder. A wide variety of film textures and powder shapes are produced of both organic and inorganic compounds. Films are produced with regular textural feature dimensions of 1.0-2.0 .mu.m down to a range of 0.01 to 0.1 .mu.m. Powders are formed in very narrow size distributions, with average sizes in the range of 0.02 to 5 .mu.m.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1988},
month = {1}
}

Patent:

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