Wafer handling and placement tool

Patent · Tue Jan 05 00:00:00 EST 1988

OSTI ID:866462

Witherspoon, Linda L ^[1]

---

1. 22 Cottonwood La., Los Lunas, NM 87031

A spring arm tool is provided for clamp engaging and supporting wafers while the tool is hand held. The tool includes a pair of relatively swingable jaw element supporting support arms and the jaw elements are notched to enjoy multiple point contact with a wafer peripheral portion. Also, one disclosed form of the tool includes remotely operable workpiece ejecting structure carried by the jaw elements thereof.

• DOE Contract Number: 26-1631
• Assignee: Witherspoon, Linda L. (22 Cottonwood La., Los Lunas, NM 87031)
• Patent Number(s): US 4717190
• Application Number: 06/925,241
• OSTI ID: 866462
• Country of Publication: United States
• Language: English

Related Subjects

wafer
handling
placement
tool
spring
arm
provided
clamp
engaging
supporting
wafers
hand
held
pair
relatively
swingable
jaw
element
support
arms
elements
notched
enjoy
multiple
contact
peripheral
portion
disclosed
form
remotely
operable
workpiece
ejecting
structure
carried
remotely operable
hand held
peripheral portion
closed form
jaw elements
support arm
/294/414/