Method of synthesizing a plurality of reactants and producing thin films of electro-optically active transition metal oxides
Patent
·
OSTI ID:866335
- Golden, CO
A method of synthesizing electro-optically active reaction products from a plurality of reactants by inducing a reaction by plasma deposition among the reactants. The plasma reaction is effective for consolidating the reactants and producing thin films of electro-optically active transition metal oxides.
- Research Organization:
- Midwest Research Institute, Kansas City, MO (United States)
- DOE Contract Number:
- AC02-83CH10093
- Assignee:
- United States of America as represented by United States (Washington, DC)
- Patent Number(s):
- US 4687560
- OSTI ID:
- 866335
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
method
synthesizing
plurality
reactants
producing
films
electro-optically
active
transition
metal
oxides
reaction
products
inducing
plasma
deposition
effective
consolidating
plasma reaction
metal oxide
transition metal
reaction product
reaction products
metal oxides
optically active
plasma deposition
active transition
electro-optically active
active reaction
/204/427/
synthesizing
plurality
reactants
producing
films
electro-optically
active
transition
metal
oxides
reaction
products
inducing
plasma
deposition
effective
consolidating
plasma reaction
metal oxide
transition metal
reaction product
reaction products
metal oxides
optically active
plasma deposition
active transition
electro-optically active
active reaction
/204/427/