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Title: Method of synthesizing a plurality of reactants and producing thin films of electro-optically active transition metal oxides

Patent ·
OSTI ID:866335

A method of synthesizing electro-optically active reaction products from a plurality of reactants by inducing a reaction by plasma deposition among the reactants. The plasma reaction is effective for consolidating the reactants and producing thin films of electro-optically active transition metal oxides.

Research Organization:
Midwest Research Institute, Kansas City, MO (United States)
DOE Contract Number:
AC02-83CH10093
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Number(s):
US 4687560
OSTI ID:
866335
Country of Publication:
United States
Language:
English