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Title: Laser/plasma chemical processing of substrates

Abstract

A process for the modification of substrate surfaces is described, wherein etching or deposition at a surface occurs only in the presence of both reactive species and a directed beam of coherent light.

Inventors:
 [1]
  1. Albuquerque, NM
Publication Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
866060
Patent Number(s):
US 4624736
Assignee:
United States of America as represented by United States (Washington, DC)
DOE Contract Number:  
AC04-76
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
laser; plasma; chemical; processing; substrates; process; modification; substrate; surfaces; described; etching; deposition; surface; occurs; presence; reactive; species; directed; beam; coherent; light; substrate surface; chemical processing; coherent light; reactive species; chemical process; substrate surfaces; active species; directed beam; /216/118/156/204/219/427/

Citation Formats

Gee, James M, and Hargis, Jr., Philip J. Laser/plasma chemical processing of substrates. United States: N. p., 1986. Web.
Gee, James M, & Hargis, Jr., Philip J. Laser/plasma chemical processing of substrates. United States.
Gee, James M, and Hargis, Jr., Philip J. Wed . "Laser/plasma chemical processing of substrates". United States. https://www.osti.gov/servlets/purl/866060.
@article{osti_866060,
title = {Laser/plasma chemical processing of substrates},
author = {Gee, James M and Hargis, Jr., Philip J.},
abstractNote = {A process for the modification of substrate surfaces is described, wherein etching or deposition at a surface occurs only in the presence of both reactive species and a directed beam of coherent light.},
doi = {},
url = {https://www.osti.gov/biblio/866060}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1986},
month = {1}
}

Patent:

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